Leybold Systems Gmbh

Applied Materials, Inc.

Applied Materials Gmbh & Co Kg

Dieter Haas

Wolfgang Buschbeck

Simon Lau

Oliver Heimel

J&ouml;rg Krempel-Hesse

Andreas Jischke

Hans Buchberger

Erkan Koparal

Andreas Geiss

Thomas Berger

In a sputtering device with magnetic amplification, a magnetic field is generated by means of a permanent magnet system, whose lines of force run above and penetrate the sputtering surface, whereby the permanent magnet system is formed of two dosed, coaxial circular or oval rows (,) of individual magnets (,&prime; . . . ) that are connected via a yoke (,), whereby the surface of the target (,) that faces away from the rows of permanent magnets (,) is formed of two partial surfaces (,) that form an angle to each other and whereby the edge (,) that is formed by the two partial surfaces (,) runs parallel to the two rows (,) of permanent magnets (,&prime; . . . ) and whereby an insert (,) made of ferromagnetic material is inserted between the magnetic yoke (,) and the surface of the target (,) that faces the magnetic yoke (,).

Sputtering device with a cathode with permanent magnet system

Growing community of inventors

Bruchköbel, Germany

Dieter Haas