Discera, Inc.

Microgen Systems, Inc.

Didier Lacroix

Kenneth R Cioffi

Wan-Thai Hsu

Kathleen M Vaeth

Michael J Simoneau

Andrew Robert Brown

Robert G Andosca

The present invention relates to a device comprising an elongate resonator beam extending between first and second ends. A base is connected to the resonator beam at the first end with the second end extending from the base as a structural layer. The elongate resonator beam comprises either: (1) a first oxide layer on a first piezoelectric stack layer over a structural layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a structural layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer. Also disclosed is a system comprising an apparatus and the device, as well as methods of making and using the device.

Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices

Disclosed herein are devices and methods for generating a modulated signal with a MEMS resonator, or microresonator. A bias, or polarization, voltage for activating the MEMS resonator is determined by a control signal, or input voltage, indicative of information to be carried by the modulated signal. In some cases, the MEMS resonator may be driven by an oscillator circuit to facilitate operation of the MEMS resonator. The control signal may include an amplitude modulated voltage or a digital data stream such that output signals of the MEMS resonator or oscillator circuit may carry information via frequency modulation, such as frequency shift keying modulation.

MEMS resonator-based signal modulation

A signal generation technique is based on a reference frequency provided by a MEMS resonator. The signal generation technique compensates for temperature- and fabrication process-induced frequency variations collectively. In some embodiments, a device implementing the disclosed signal generation technique includes a fractional-N synthesizer, a temperature sensor, calibration data, and a sigma-delta modulator to adjust the reference frequency of the MEMS resonator to a desired frequency value while compensating for the temperature variation of the MEMS resonator.

Frequency and temperature compensation synthesis for a MEMS resonator

Disclosed herein is a timing device that includes a resonator device to generate a resonator output signal at a frequency offset from a desired frequency, a counter configured to generate an extraction signal in accordance with the frequency offset, and a timing signal generator configured to track time with a count based on the resonator output signal and modified by the extraction signal downward to reach the desired frequency.

Counter-based resonator frequency compensation

Disclosed herein is a signal generation technique based on a reference frequency provided by a MEMS resonator. The signal generation technique compensates for temperature- and fabrication process-induced frequency variations collectively. In some embodiments, a device implementing the disclosed signal generation technique includes a fractional-N synthesizer, a temperature sensor, calibration data, and a sigma-delta modulator to adjust the reference frequency of the MEMS resonator to a desired frequency value while compensating for the temperature variation of the MEMS resonator.

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Los Gatos, CA, United States of America

Didier Lacroix