Hubei University of Technology

Electric Power Research Institute, China Southern Power Grid

Handan Puxin Electric Power Technology Co., Ltd.

Dibo Wang

Mingli Fu

Lei Jia

Xiaoxing Zhang

Kun Wan

Shuangshuang Tian

Guozhi Zhang

Yalong Li

Guangke Li

Guoguang Zhang

Zhaodi Yang

Disclosed are a tungsten hexafluoride preparation method and apparatus based on photoelectric synergy. A photocatalyst and metal tungsten are sequentially filled in a discharge area of a plasma reactor in a direction of gas entry, and the discharge area of the plasma reactor is irradiated with light at the same time; the background gas generates a large amount of plasma in the discharge area, SFundergoes decomposition under the synergistic effect of photocatalysis and plasma, SFis decomposed to generate fluorine atoms and low-fluorine sulfides such as SFand SF. The generated fluorine ions, SF, SFand low-fluorine sulfides further react with metal tungsten to generate WFspecialty gas, which not only realizes the utilization of fluorine resources of SF, but also replaces highly toxic fluorine gas with non-toxic SFexhaust gas in the plasma reactor for reaction, thereby ensuring safe operation and low energy consumption.

Tungsten hexafluoride preparation method and apparatus based on photoelectric synergy

Growing community of inventors

Guangzhou, China

Dibo Wang