Motorola Corporation

Diann M Dow

Vida Ilderem

Robert Bruce Davies

Michael H Kaneshiro

E James Prendergast

Peter J Zdebel

Andreas A Wild

Juan Buxo

James David Burnett

Frank K Baker

Richard D Sivan

Sergio A Ajuria

Thomas E Zirkle

Michael P Masquelier

Mark D Griswold

Vida Ilderem Burger

Kevin M Klein

Ziye Zhou

Soolin Kao

Iksung Lim

James E Prendergast

Susan E Soggs

A graded-channel semiconductor device (10) is formed in a pedestal (12). The pedestal (12) is formed on a substrate (11) and improves the electrical characteristics of the device (10) compared to conventional device structures. The pedestal (12) has sides (13) that are bordered by a first dielectric layer (24) to provide electrical isolation. An interconnect structure (90) can be optionally formed in conjunction with the formation of the device (10). The interconnect structure (90) has a plurality of conductors (60,97) that can be used to transport electrical signals across the device (10).

Semiconductor device having a pedestal and method of forming

A low voltage field effect transistor structure (20) is provided with a threshold voltage that is tolerant of process variations that alter the location of a source implant region (41). A first halo region (33) and a second halo region (36) are formed adjacent to source region (41) such that after subsequent thermal processing, a constant doping profile of opposite conductivity as source region (41) is formed in the channel region (23) adjacent the source region (41). The embodiments can be formed either adjacent to only the source region (41) to create a unilateral device, or the doping profile can be formed adjacent to both source region (41) and a drain region (40) to produce a bilateral device. An additional embodiment forms a second implant region in source region (41) to reduce junction leakage and capacitance.

FET with stable threshold voltage and method of manufacturing the same

A method for forming an integrated circuit involves forming trench isolation regions (208a) and a damascene gate electrode region (214) simultaneous with one another via overlapping process steps. By performing this simultaneous formation of a trench region (208a) and a damascene gate electrode (214) using a common dielectric layer (208), MOS integrated circuits can be formed with reduced processing steps while simultaneously avoiding adverse polysilicon stringers which are present in prior art damacene-formed gate electrode. A single dielectric layer (208) is deposited in order to provide trench fill material for a trench region (208a) while simultaneously providing the material needed for form an opening (210) which is used to define the dimensions and material content of a gate electrode (214).

Combined trench isolation and inlaid process for integrated circuit

A graded-channel semiconductor device (10) is formed in a pedestal (12). The pedestal (12) is formed on a substrate (11) and improves the electrical characteristics of the device (10) compared to conventional device structures. The pedestal (12) has sides (13) that are bordered by a first dielectric layer (24) to provide electrical isolation. An interconnect structure (90) can be optionally formed in conjunction with the formation of the device (10). The interconnect structure (90) has a plurality of conductors (60, 97) that can be used to transport electrical signals across the device (10).

Semiconductor device having a pedestal

An insulated gate field effect transistor (IGFET) structure (10) includes a source region (14) and a drain region (16) formed in an impurity well (13). A channel region (18) separates the source region (14) from the drain region (16). In one embodiment, a unilateral extension region (17) is formed adjacent the source region (14) only and extends into the channel region (18). The unilateral extension region (17) has a peak dopant concentration at a depth (23) and a lateral distance (24) to provide punchthrough resistance. The IGFET structure (10) is suitable for low (i.e., 0.2-0.3 volts) to medium (0.5-0.6 volts) threshold voltage reduced channel length applications.

Insulated gate field effect transistor structure having a unilateral

A method for forming a unilateral, graded-channel field effect transistor and a transistor stock 200 that includes providing a substrate (10) with an overlying gate electrode (14, 16). A spacer (23) is formed on only the drain side of the electrode. A graded-channel region (36) is formed aligned to the source side of the electrode while the spacer protects the drain side of the channel region. Source/drain regions (38) are formed, the spacer is removed, and then a drain extension region (40) is formed aligned to the drain side of the electrode.

Method of forming a semiconductor device

An insulated gate field effect transistor (10) having an reduced gate to drain capacitance and a method of manufacturing the field effect transistor (10). A dopant well (13) is formed in a semiconductor material (11). A gate oxide layer (26) is formed on the dopant well (13) wherein the gate oxide layer (26) and a gate structure (41) having a gate contact portion (43) and a gate extension portion (44). The gate contact portion (43) permits electrical contact to the gate structure (41), whereas the gate extension portion (44) serves as the active gate portion. A portion of the gate oxide (26) adjacent the gate contact portion (43) is thickened to lower a gate to drain capacitance of the field effect transistor (10) and thereby increase a bandwidth of the insulated gate field effect transistor (10).

Insulated gate semiconductor device and method of manufacture

Insulated gate field effect transistors (10, 70) having process steps for setting the V.sub.T and a device leakage current which are decoupled from the process steps for providing punchthrough protection, thereby lowering a subthreshold swing. In a unilateral transistor (10), a portion (37, 45) of a dopant layer (25, 30) between a source region (48, 51) and a drain region (49, 52) serves as a channel region and sets the V.sub.T and the device leakage current. A halo region (34, 39) contains the source region (48, 51) and sets the punchthrough voltage. In a bilateral transistor (70), both a source region (83, 86) and a drain region (84, 87) are contained within halo regions (75, 74, 79, 81). A portion (76, 82) of a dopant layer (25, 30) sets the V.sub.T and a leakage current, whereas the halo region (75, 79) sets the punchthrough voltage.

Method for fabricating insulated gate field effect transistor having

Insulated gate field effect transistors (10, 70) having independent process steps for setting lateral and vertical dopant profiles for source and drain regions. In a unilateral transistor (10) , portions (48, 50, 51, 55) of the source region are contained within a halo region (34, 41) whereas portions (49, 47, 52, 64) of the drain region are non contained within a halo region. The source region (60, 65) has a first portion (48, 51) for setting a channel length and a second portion (50, 55 ) for setting a breakdown voltage and a source/drain capacitance. The second portion (50, 55) extends further into the halo region than the first portion (48, 51). In a bilateral transistor (70), portions (84, 89, 90, 91) of the drain region (72, 87) are contained within halo region (75, 79 ).

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Chandler, AZ, United States of America

Diann M Dow