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Diana L Johnson

Shan Sun

George Hickert

John Ortega

Eric Dale

Masahisa Ueda

A method for fabricating integrated capacitors, of particular utility in forming a ferroelectric capacitor array for a ferroelectric memory integrated circuits, begins with provision of a substrate. The substrate is typically a partially-processed CMOS integrated circuit wafer coated with an adhesion layer. Upon the substrate is deposited a bottom electrode layer, typically of noble metal, a dielectric layer, typically doped PZT, and a top electrode layer, typically a noble metal oxide. Next is deposited a hardmask layer of strontium ruthenium oxide, followed by a photoresist layer. The photoresist layer is aligned, exposed, developed, and cured as known in the art of integrated circuit photolithography. The resulting stack is then dry etched to remove undesired portions of the hardmask layer, the top electrode layer, and the dielectric layer. A principle advantage of the process is that a single photomasking operation is sufficient to define the top electrode and dielectric layers.

Structure for masking integrated capacitors of particular utility for ferroelectric memory integrated circuits

A device for measuring infants has an elongated measuring base having at least one sequence of linear measuring indicia thereon extending from one end of the measuring base parallel to the axis of elongation. The base has a pair of opposed channels extending substantially the length of the measuring base parallel to the axis of elongation. A fixed end stop extends upward from the one end. A measuring stop is slidably connected between the pair of opposed channels of the measuring base. The measuring stop has a channel slide member with two opposed, parallel, channel-engaging edges that are biased to frictionally engage the interior of the opposed channels. Release means is operably connected to the channel slide member for counteracting the bias toward frictional engagement of the interior of said opposed channels. An index panel extends upward from the channel slide member and has an indicating relationship with the sequence of measuring indicia.

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Wrenshall, MN, United States of America

Diana L Johnson