Massachusetts Institute of Technology

The University of Texas System

Dhiman Bhattacharyya

Karen K Gleason

Richard B Timmons

Narayan Mukherjee

Dattatray Wavhal

Miles C Barr

Richard Brendon Timmons

Described herein are reactors capable of sequentially or simultaneously depositing thin-film polymers onto a substrate by oxidative chemical vapor deposition (oCVD), initiated chemical vapor deposition (iCVD), and plasma-enhanced chemical vapor deposition (PECVD). The single-unit CVD reactors allow for the use of more than one CVD process on the same substrate without the risk of inadvertently exposing the substrate to ambient conditions when switching processes. Furthermore, the ability to deposit simultaneously polymers made by two different CVD processes allows for the exploration of new materials. In addition to assisting in the deposition of polymer films, plasma processes may be used to pretreat substrate surfaces before polymer deposition, or to clean the internal surfaces of the reactor between experiments.

Single-unit reactor design for combined oxidative, initiated, and plasma-enhanced chemical vapor deposition

The present invention includes compositions and methods for synthesis of composite materials involving gas phase plasma polymerization to covalently plasma graft an organic molecule onto inorganic particles; covalently binding an organic monomer to the functionalized inorganic particles; and, polymerizing the organic monomers into inorganic/organic hybrid polymer composite materials.

Covalently functionalized particles for synthesis of new composite materials

A chemiresistive biosensor for detecting an analyte can include a high specific surface area substrate conformally coated with a conductive polymer, and a binding reagent immobilized on the conductive polymer, wherein the binding reagent has a specific affinity for the analyte. The conductive polymer can be deposited on a substrate by oCVD.

Biosensors

The present invention includes compositions and methods for synthesis of composite materials involving gas phase plasma polymerization to covalently plasma graft an organic molecule onto particles; covalently binding an organic monomer to the functionalized particles; and, polymerizing the organic monomers into hybrid polymer composite materials.

Growing community of inventors

Arlington, MA, United States of America

Dhiman Bhattacharyya