Globalfoundries Inc.

Devender

Sunil Kumar Singh

Dewei Xu

M Golam Faruk

The present disclosure describes a method or forming vertical natural capacitor (VNCAP) and the resulting device. The method includes applying a patterned mask over an insulation layer. The method includes forming using the patterned mask, a dielectric trench in the insulation layer. The method includes depositing a high dielectric constant k (high k) layer in the dielectric trench. The method includes forming a first trench and a second trench in the high k dielectric layer. The high k dielectric layer is disposed between the first trench and the second trench. The method includes depositing metal in the first trench and the second trench.

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Pflugerville, TX, United States of America

Devender