Hyundai Electronics Industries Co. Ltd.

Deuk-Soo Pyun

Nak-Heon Choi

Do-Young Ok

Jin-Man Kim

Woo-Seok Yang

A method for manufacturing a ferroelectric random access memory (FeRAM) device which includes the steps of preparing an active matrix provided with a transistor, diffusion regions, an isolation region, a bit line, a first insulating layer and a second insulating layer; forming a first conductive layer and then a dielectric layer on the active matrix; carrying out a rapid thermal annealing (RTA) for producing nuclei in the dielectric layer; forming a second conductive on top of the dielectric layer; carrying out a thermal annealing in a furnace; forming a capacitor structure provided with a top electrode, a capacitor thin film and a bottom electrode by patterning the second conductive, the dielectric and the first conductive layers into a first predetermined configuration; carrying out a first recovery; forming a third insulating layer on the capacitor structure and the second insulating layer; patterning the third insulating layer to form a first opening and a second opening; and carrying out a second recovery.

Method of manufacturing a semiconductor memory device incorporating a capacitor therein

A plasma display panel is disclosed including a transparent insulating substrate having a plurality of striped grooves, whose portions between the grooves serve as barrier ribs; vertical transparent electrodes each of which is formed in each groove; a fluorescent layer formed on the vertical transparent electrode; horizontal electrodes in strip arrangement having a predetermined distance between one another, and being perpendicular to the transparent vertical electrodes; and supporting means which are respectively located on the edge portions of the substrate for supporting the horizontal electrodes.

Plasma display panel and method of fabricating the same

A plasma display panel is disclosed including: a transparent insulating substrate; a plurality of transparent electrodes in a strip arrangement with each electrode having a groove that runs along the median of its surface and has a predetermined width and depth at its center, and side walls on both sides of the groove, the side walls serving as barrier ribs; a fluorescent layer formed in each groove; and a plurality of electrodes in strip arrangement having a predetermined distance between one another and perpendicular to the transparent electrodes, the electrodes being supported by supporting means formed on a predetermined portion of barrier rib located on the edge portion of the substrate.

Growing community of inventors

Seoul, South Korea

Deuk-Soo Pyun