Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Detlef Kunze

Martin Friedrichs

Peter Duerr

Ralf Gottfried-Gottfried

Andreas Gehner

Andreas Neudert

Heinz K&uuml;ck

Christoph Hohle

Linus Elsäber

Matthias Schulze

Linus ELSÄSSER

An MMS includes a substrate, an element movable with respect to the substrate and a frame structure. A first pair of springs is arranged between the substrate and the frame structure along a first spring direction. A second pair of springs is arranged between the movable element and the frame structure along a second spring direction. The frame structure is configured to generate tensile stress in the second pair of springs at tensile stress acting in the first pair of springs.

MMS, MMS array, MEMS actuator and method for providing an MMS

An electromechanical component and an electromechanical component arrangement for proving the existence of a potential difference which consists of a first electrode, a second electrode and a proving structure. The proving structure is configured to be deflected in the event of there being a potential difference. In addition, an electromechanical component is configured to generate a useful effect. A method implements operation of an electromechanical component for proving the existence of a potential difference, other methods implement operation for performing a functional test on the electromechanical component.

Electromechanical component, electromechanical component arrangement, method of detecting a potential difference by using an electromechanical component, and method for performing a functional test on the electromechanical component

Embodiments of the present invention provide an MEMS actuator with a substrate, at least one post attached to the substrate and a deflectable actuator body that is connected to the at least one post via at least one spring, wherein, during electrostatic, electromagnetic or magnetic force application, the actuator body takes a second position starting from a first position by a tilt-free translational movement, wherein the first position and the second position are different, and wherein in a top view of the MEMS actuator the actuator body is arranged outside an area spanned by the at least one post.

MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator

A structure for the phase modulation of light (,) incident upon said structure comprises a mirror (,), a deformable and transparent dielectric (,) disposed on the mirror (,), at least two electrodes (,) having one or several fixed potentials and being adapted to have one or more control voltages applied thereto for generating an electric field (,) in at least a partial region of said dielectric (,), thereby changing the optical path length of the light passing through said dielectric (,) with respect to a state of the dielectric (,) in which the electric field is not applied thereto. An arrangement of a plurality of such phase-modulating structures applied on a CMOS active matrix constitutes a very large scale integrated spatial light modulator.

Phase-modulating microstructures for highly integrated surface light modulators

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Dresden, Germany

Detlef Kunze