Robert Bosch

Detlef Gruen

Christoph Schelling

Heribert Weber

Frank Fischer

Joerg Muchow

Hans Hecht

Horst Muenzel

Helmut Baumann

Ulrich Wagner

Andreas Duell

Christoph Treutler

Steffen Schmidt

Henrik Siegle

Winfried Bernhard

Matthias Fuertsch

Peter Hein

Rainer Schink

Andreas Stratmann

Andreas Lock

Roland Müller-Fiedler

A micromechanical sensor and a method for manufacturing a micromechanical sensor which has at least one membrane are provided. The membrane is made of a first material which is accommodated in a surrounding second material, and the membrane is configured for sensing a medium surrounding it. The membrane is reinforced, at least partly, by a third material at break-sensitive points on the membrane rim. Reinforcement of the membrane rim increases the stability and thus also the service life of the membrane and the sensor.

Membrane sensor

The present invention relates to a method for producing a GMR structure in which a metallic multiple layer is applied onto a carrier and in which the metallic multiple layer is patterned to produce the GMR structure, the carrier having a structure before the metallic multiple layer is applied and the patterning of the metallic multiple layer is performed by CMP. The present invention also relates to a GMR structure having a carrier and a patterned metallic multiple layer positioned on the carrier, the patterned metallic multiple layer being situated in one or more depressions of the carrier. In addition, the present invention relates to a use of GMR structures.

Giant magnetoresistance structure

In a mass flow sensor having a frame of monocrystalline silicon and a membrane fixed therein, a heating element and, if indicated, temperature-measuring elements are provided on the membrane. A heat-conducting element, which extends from the membrane across the frame, is provided in the edge area of the membrane. The heating element, the heat-conducting element and, if indicated, temperature-measuring elements are patterned out of a single metal layer.

Mass flow sensor

Growing community of inventors

Reutlingen, Germany

Detlef Gruen