Siemens Aktiengesellschaft

Icos Vision Systems Nv

Infineon Technologies Ag

Other

Siemens Aktiengesellschsft

Detlef Gerhard

Johannes Lechner

Eckhard Marx

Martin Renner

Georg Bachmaier

Thomas Matschullat

Wolfgang Zöls

Gerit Ebelsberger

Detlef Rieger

Andreas Gödecke

Volker Tegeder

Richard Poleschinski

Dieter Fink

Johann Lechner

Reinhard Sesselmann

Steffen Franke

Jens Muller

Rudiger Froese-Peeck

Andreas GÖDECKE

An adapter which allows an object to be pulled into a chamber after being gripped by a gripper module with a drive, said chamber being formed by an outer shell is provided. The outer shell is designed to at least partly cover the object and is sufficiently large so as to shield the object. The adapter can be understood as a gripper base system to which the gripper module is adapted. The drive pulls the entire gripper module including the object into the gripper base system. The adapter provides a safety gripper system with an object housing for a safe human/robot interaction. The outer shell protects persons from sharp-edged objects which are gripped by the gripper module and which could otherwise lead to an injury of the persons located in the working area.

Device for attaching to a robot

The invention relates to a lifting system, comprising a piezoelectric actuator (), a support (), and a hydraulic stroke multiplier () having an input and an output side, wherein the input side of the hydraulic stroke multiplier is connected to the piezoelectric actuator (), and the output side of the hydraulic stroke multiplier is connected to the support (). In the method for electrically testing an electronic component, the component is placed on the support of such a lifting system and is lifted for positioning relative to a test contact. The vibration damper comprises such a lifting system. The machine assembly has a machine and such a vibration damper.

Lifting system, method for electrical testing, vibration damper, and machine assembly

A device and a method for moving an object in a vertical direction are disclosed. The device includes a plurality of piezo-actuators expanding in directions upon activation and in doing so generating pressure forces on an active side, and a hydraulic transmission device that converts the pressure forces of the piezo-actuators into a vertical pressure force for moving the object opposite the direction of gravity and transmits the pressure force with a transmission ratio. The object is lifted after the vertical pressure force has exceeded an oppositely acting spring force of a spring system.

Apparatus and method for lifting objects

In a method for determining a state variable of an electric arc furnace, especially for determining the level of the foamed slag () in a furnace, the energy supplied to the furnace is determined with the aid of at least one electric sensor while solid-borne noise is measured in the form of oscillations on the furnace. The state variable is determined by a transfer function which is determined by evaluating the measured oscillations and evaluating measured data of the electric sensor. The state of the foamed slag level can thus be reliably recognized and be monitored over time. The foamed slag level is decisive for the effectiveness with which energy is fed into the furnace. Furthermore, losses caused by radiation are reduced by covering the arc with the foamed slag. The improved measuring method allows the foamed slag level to be automatically controlled or regulated in a reliable manner.

Method for determining at least one state variable of an electric arc furnace, and electric arc furnace

An LED arrangement (light emitting diode) has a plurality of adjacent radiating LEDs that are nearly identically aligned for forming an extended area light source. The LEDs are attached to a metallic multi-film support having sandwich-like insulating intermediate layers and having at least a step-like structure with at least one step. At least one LED chip is placed on each step on a metal film and the metal layer directly above is formed of a corresponding shortening or recess for mounting an LED.

LED arrangement

The invention relates to a gripper for handling frames () that are covered with a film () that is intended for the transport of wafers (). The gripper comprises at least two flat fingers () that carry flattened finger tips (). This construction allows to insert the gripper between two frames () that are mounted in a cassette () without complication. The fingers () support in subsections both the frame () and the film (). The film is attached to the frame due to the suction effect exerted by vacuum openings () configured on the frame, thereby fixating the film on the gripper.

Gripper and method of operating the same

Illumination unit and method for the operation thereof

The orientation of the surface of an object to be examined is changed by adjusting the distance thereof to an optical measuring system in a plane-parallel manner in relation to a focusing plane of the optical measuring system, enabling high speeds of examination to be obtained during examination of the extended surfaces of the object. A distance-measurement system which is mounted in an auxiliary manner with regard to the measuring head enables fluctuations in the topography inside the surface of the object to be compensated in such a way that a currently received point or area can be optically sharpened.

Device and method for plane-parallel orientation of a the surface of an object to be examined in relation to a focus plane of a lens

An inspection system optically examines the surfaces of objects to detect surface errors. The system scans image strips and, consequently, a given surface rapidly and with sufficient resolution using a linescan camera and an upstream microscope by aligning the captured lines.

System for inspecting the surfaces of objects

A metrology device is described which is couplable to a load port of a semiconductor product handling and/or processing tool. The tool encloses a mini-environmental atmosphere and has a load port table for supporting devices to be coupled to the load port. The metrology device contains a housing preserving an inner atmosphere, a coupling region for connecting the inner atmosphere to the mini-environmental atmosphere and a measuring device for measuring a property of a semiconductor product. The metrology device further has a support which is movable by a transport device and which is dimensioned such that the metrology device is self-supporting in a position appropriate for coupling the coupling region to the load port. The metrology device is thereby couplable to the load port without being supported by the load port table.

Self-supporting adaptable metrology device

A wafer marking is disclosed, which is represented by a large number of soft marks incorporated into a surface of a wafer. The soft marks each have a depth of at least 4 &mgr;m, an internal diameter of at least 50 &mgr;m and, in a particularly advantageous manner, a minimum gradient their surface of 0.2. These depressions can be proded, using appropriate technology, with depths of up to &mgr;m.

Wafer marking

A configuration for the automatic inscription or reinscription of wafers provides the wafers with a marking for identification and for process management during the production of semiconductor components. The wafer must be moved between different stations for the automatic inscription of a wafer in an appropriate device. Considerable transport movements are saved by the integration of a read station in an inscription chamber having a positioning unit for the wafer.

Configuration for the automatic inscription or reinscription of wafers

Method for imaging bar codes

An optical pick-up device for image processing systems has an objective for generating an optical image of a subject to be registered, an image-to-signal transducer, particularly a CCD camera that converts the optical image into a video signal and an illumination device for illumination of the subject to be registered in incident light. The rugged and high-performance illumination device, that yields an optimum light distribution in the plane of registration, has a plurality of infrared diodes that are arranged with equal spacing on at least one circle coaxial with the optical axis of the objective. It also has at least one annular deflection device that is similarly arranged coaxial with the optical axis. This deflection device concentrates the light emitted by the infrared diodes obliquely onto the subject from all sides.

Growing community of inventors

Munich, Germany

Detlef Gerhard