Asml Netherlands B.v.

Derk Ten Hoopen

Hans Butler

Cornelius Adrianus Lambertus De Hoon

Jeroen Pieter Starreveld

Martinus Van Duijnhoven

Evert Hendrik Jan Draaijer

Edward Hage

Pieter Johannes Gertrudis Meijers

Ingmar August Kerp

Eric Pierre-Yves Vennat

Wesley Ooms

Francois-Xavier Debiesme

The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.

Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method

A support device configured to support a first part relative to a second part, minimizing the transfer of vibration between the two parts, includes a supporting system configured to use gas under pressure to provide a support force between the first and second parts; a gas chamber connected to the supporting system and configured to contain the gas under pressure and provide the gas under pressure to the supporting system; and a section of acoustic damping material, arranged at a location within the gas chamber so as to separate a first gas containing region and a second gas containing region within the gas chamber, wherein the section of acoustic damping material has a first side and a second side, wherein the first gas containing region is on the first side and the second gas containing region is on the second side.

Support device, lithographic apparatus and device manufacturing method

Growing community of inventors

Veldhoven, Netherlands

Derk Ten Hoopen