Lam Research Corporation

Other

Momentus Space LLC

Derek Wong

Patrick A Van Cleemput

Artur Kolics

Kaihan Abidi Ashtiani

Yezdi N Dordi

Larry Zhao

Praveen Nalla

William T Lee

George Andrew Antonelli

Nerissa Sue Draeger

Bart Jan Van Schravendijk

Deenesh Padhi

Krishna Nittala

Nicholas Muga Ndiege

Lie Zhao

Luigi Celano

Garun Arustamov

Jason Park

Lee Wilson

A system for harvesting solar energy on a spacecraft includes a stiff substrate layer and a working layer disposed on the substrate layer to provide at least one of a photovoltaic or a reflective function. In a first operational state, the substrate layer is arranged as a tape spring to store potential energy which causes the substrate layer to uncoil and provide, in a second operational state, a photovoltaic module and/or a solar concentrator.

Rollable tape spring solar array

A substrate is provided having a dual damascene structure formed within a dielectric material over the substrate. The dual damascene structure includes a trench and an opening formed to extend from a bottom of the trench to an underlying conductive material, with the underlying conductive material exposed at a bottom of the opening. The dual damascene structure is exposed to a sealing process by which the exposed surfaces of the dielectric material in the opening are sealed without covering the underlying conductive material exposed at the bottom of the opening. The sealing process can be one or more of deposition of a flowable film, deposition of an amorphous carbon barrier layer, and formation of a self-assembled monolayer of an amino group. After the sealing process, an electroless deposition process is performed to fill the opening with a metallic material in a bottom-to-top manner up to the bottom of the trench.

Interlevel conductor pre-fill utilizing selective barrier deposition

Implementations of the methods and apparatus disclosed herein relate to pore sealing of porous dielectric films using flowable dielectric material. The methods involve exposing a substrate having an exposed porous dielectric film thereon to a vapor phase dielectric precursor under conditions such that a flowable dielectric material selectively deposits in the pores of the porous dielectric material. The pores can be filled with the deposited flowable dielectric material without depositing a continuous film on any exposed metal surface.

Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor

Methods for depositing flowable dielectric films using halogen-free precursors and catalysts on a substrate are provided herein. Halogen-free precursors and catalysts include self-catalyzing aminosilane compounds and halogen-free organic acids. Flowable films may be used to fill pores in existing dielectric films on substrates having exposed metallization layers. The methods involve hydrolysis and condensation reactions.

Low-K oxide deposition by hydrolysis and condensation

A method of using low voltage-swing clocks ( ) with CMOS latches ( ) and with bi-CMOS latches ( ) and associated circuit structures to reduce power requirements of these circuits compared to conventional CMOS and bi-CMOS circuits. Also, a method of using low voltage-swing clocks ( ) to control CMOS (FIG. ) and bi-CMOS dynamic logic. The power consumption of CMOS and bi-CMOS microprocessors and other chips can be substantially reduced by using low voltage-swing clocks, with savings of up to 60% to 80% of the normal clock power at speeds comparable to using normal latches and dynamic logic gates, with noise margins sufficient for safe operation.

Digital circuits exhibiting reduced power consumption

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San Jose, CA, United States of America

Derek Wong