Applied Materials, Inc.

Gtat Corporation

Twin Creeks Technologies, Inc.

Twin Creeks Technology, Inc.

Derek G Aqui

Steven M Zuniga

Andrew J Nagengast

Keenan Leon Guerrero

Robert D Tolles

Anthony Joseph Senn

Aditya Agarwal

Harish Kumar Bolla

Kirk G Liebscher

John M Alexander

Peter G Borden

Lisong Zhou

Vinay K Shah

Virendra V S Rana

Venkateswaran Subbaraman

Zhenhua Zhang

Keith Brian Porthouse

Tristan R Holtam

Ian Scott Latchford

A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.

Bonding apparatus and method

A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.

Apparatus and method for simultaneous treatment of multiple workpieces

A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.

Two-chamber system and method for serial bonding and exfoliation of multiple workpieces

The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.

Advanced platform for processing crystalline silicon solar cells

A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.

An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.

Laser system for processing solar wafers in a carrier

Growing community of inventors

Portland, OR, United States of America

Derek G Aqui