Taiwan Semiconductor Manufacturing Comp. Ltd.

Der-Chyang Yeh

Chen-Hua Douglas Yu

Hsien-Wei Chen

An-Jhih Su

Chi-Hsi Wu

Li-Hsien Huang

Wei-Cheng Wu

Shin-Puu Jeng

Cheng-Hsien Hsieh

Ming Shih Yeh

Wei-Yu Chen

Li-Han Hsu

Ming-Shih Yeh

Shuo-Mao Chen

Jie Chen

Ying-Ju Chen

Jui-Pin Hung

Jing-Cheng Lin

Chiung-Han Yeh

Tsung-Shu Lin

Shang-Yun Hou

Hua-Wei Tseng

Wen-Chih Chiou

Po-Hao Tsai

Yueh-Ting Lin

Yi-Jou Lin

Yu-Hung Lin

Ming-Yen Chiu

Shih-Peng Tai

Chun Hua Chang

Chia-Nan Yuan

Chih-Ping Chao

Hung-Jui Kuo

Tsang-Jiuh Wu

Cheng-Chieh Hsieh

Chin-Chuan Chang

Shih-Guo Shen

Kuo-Chung Yee

Ching-Wen Hsiao

Ta-Wei Liu

Wei-yu Chen

Chung-Shi Liu

Chuei-Tang Wang

Jaw-Juinn Horng

Chung-Hui Chen

Sung-Hui Huang

Yuan-Hung Liu

Kuang-Wei Cheng

Tien-Chung Yang

Wei-Chih Lai

Shih-Hui Wang

Yi-Chung Huang

Chewn-Pu Jou

Szu-Wei Lu

Yung-Chow Peng

Chung-Yi Yu

Huan-Neng Chen

Ying-Ching Shih

Han-Ping Pu

Ming Chyi Liu

Feng Wei Kuo

Chih-Wei Wu

Hsun-Chung Kuang

Hsing-Kuo Hsia

Hsi-Kuei Cheng

Hua-Chou Tseng

Chia-Lin Yu

Guan-Yu Chen

Yu-Chen Hsu

Chien-Chia Chiu

Chuan-Ying Lee

Chiang Lin

Chien-Fu Tseng

Shao-Yun Chen

Chin-Hao Su

Chien-Yu Li

Kuan-Chung Lu

Hao-Hsun Lin

Ming-Da Cheng

Alexander Kalnitsky

Ching-Hua Hsieh

Ruey-Hsin Liu

Sung-Feng Yeh

Ming-Chih Yew

Li-Hui Cheng

Yuan-Tai Tseng

Yu-Jen Chen

Yi-Jen Lai

Shing-Chao Chen

Mingo Liu

Yan-Fu Lin

Chie-Iuan Lin

Ming-Hsien Chen

Jian-Wei Hong

Chin-Hsien Chen

Hung-Jui Kou

Ping-Chun Yeh

Li-Wen Chang

Ping Chun Yeh

Chun-Yi Liu

A semiconductor package includes a semiconductor die including an active surface and an electrical terminal on the active surface, and a redistribution circuitry disposed on the active surface of the semiconductor die and connected to the electrical terminal. A top surface of the redistribution circuitry includes a planar portion and a concave portion connected to the planar portion, the concave portion is directly over the electrical terminal, and a minimum distance measured from a lowest point of the concave portion to a virtual plane where the planar portion is located is equal to or smaller than 0.5 μm.

Semiconductor package and method of manufacturing the same

A package includes a corner, a device die, a plurality of redistribution lines underlying the device die, and a plurality of metal pads electrically coupled to the plurality of redistribution lines. The plurality of metal pads includes a corner metal pad closest to the corner, wherein the corner metal pad is a center-facing pad having a bird-beak direction substantially pointing to a center of the package. The plurality of metal pads further includes a metal pad farther away from the corner than the corner metal pad, wherein the metal pad is a non-center-facing pad having a bird-beak direction pointing away from the center of the package.

Packages with metal line crack prevention design

In some embodiments, laser devices having contact pads are formed. The laser diodes are formed from a doped semiconductive material. The contact pads and semiconductive material share an ohmic junction. Underbump metallurgies are formed on the contact pads. Conductive connectors are electrically coupled to the laser devices. The underbump metallurgies help prevent metal inter-diffusion between the contact pads and conductive connectors. As such, when reflowing the conductive connectors, the junction of the contact pads and semiconductive material may retain its ohmic properties.

Semiconductor device and method

In an embodiment, a device includes: an integrated circuit die; a first dielectric layer over the integrated circuit die; a first metallization pattern extending through the first dielectric layer to electrically connect to the integrated circuit die; a second dielectric layer over the first metallization pattern; an under bump metallurgy extending through the second dielectric layer; a third dielectric layer over the second dielectric layer and portions of the under bump metallurgy; a conductive ring sealing an interface of the third dielectric layer and the under bump metallurgy; and a conductive connector extending through the center of the conductive ring, the conductive connector electrically connected to the under bump metallurgy.

Semiconductor packages

A method of manufacturing a semiconductor device includes the following steps. A semiconductor substrate is provided. A plurality of dielectric layers and a plurality of first conductive features in the dielectric layers are formed on the semiconductor substrate. At least one polymer layer and a plurality of second conductive features in the at least one polymer layer on the dielectric layers are formed. A plurality of conductive connectors are formed to electrically connect to the second conductive features. The semiconductor substrate, the dielectric layers and the at least one polymer layer are cut into a plurality of dies.

Methods of manufacturing semiconductor devices

A method includes attaching a first-level device die to a dummy die, encapsulating the first-level device die in a first encapsulating material, forming through-vias over and electrically coupled to the first-level device die, attaching a second-level device die over the first-level device die, and encapsulating the through-vias and the second-level device die in a second encapsulating material. Redistribution lines are formed over and electrically coupled to the through-vias and the second-level device die. The dummy die, the first-level device die, the first encapsulating material, the second-level device die, and the second encapsulating material form parts of a composite wafer.

Devices employing thermal and mechanical enhanced layers and methods of forming same

A method includes attaching a first die and a second die to a first wafer, the first wafer comprising: a first carrier substrate; and a first interconnect structure comprising first dielectric layers and first conductive features embedded in the first dielectric layers; attaching a third die to the first die and a fourth die to the second die; attaching a second wafer to the third die and the fourth die, the second wafer comprising: a second carrier substrate; and a second interconnect structure comprising second dielectric layers and second conductive features embedded in the second dielectric layers; removing the first carrier substrate; patterning the first dielectric layers to expose conductive features of the first die and the second die; and forming external connectors through the first dielectric layers, the external connectors being electrically connected to corresponding ones of the conductive features of the first die and the second die.

Integrated circuit package and method of forming the same

A method of forming an integrated circuit package includes following operations. A padding layer is formed on a portion of a carrier. A first semiconductor die is placed on the padding layer and a second semiconductor die is placed on the carrier. The first semiconductor die and the second semiconductor die are encapsulated with a first encapsulation layer. A first redistribution layer structure is formed over the first semiconductor die, the second semiconductor die and the first encapsulation layer. A third semiconductor die is placed on the first redistribution layer structure. The third semiconductor die is encapsulated with a second encapsulation layer. A second redistribution layer structure is formed over the third semiconductor die and the second encapsulation layer. The carrier is debonded. The padding layer is removed, and therefore, a recess is formed in the first encapsulation layer.

Method of forming an integrated circuit package having a padding layer on a carrier

A package comprises at least one first device die, and a redistribution line (RDL) structure having the at least one first device die bonded thereto. The RDL structure comprises a plurality of dielectric layers, and a plurality of RDLs formed through the plurality of dielectric layers. A trench is defined proximate to axial edges of the RDL structure through each of the plurality of dielectric layers. The trench prevents damage to portions of the RDL structure located axially inwards of the trench.

Semiconductor package dielectric susbtrate including a trench

A semiconductor package includes a circuit substrate, a die, a frame structure, and a heat sink lid. The die is disposed on the circuit substrate and electrically connected with the circuit substrate. The die includes two first dies disposed side by side and separate from each other with a gap between two facing sidewalls of the two first dies. The frame structure is disposed on the circuit substrate and surrounding the die. The heat sink lid is disposed on the die and the frame structure. The head sink lid has a slit that penetrates through the heat sink lid in a thickness direction and exposes the gap between the two facing sidewalls of the two first dies.

Semiconductor package and manufacturing method thereof

Stacked semiconductor devices and methods of forming the same are provided. Contact pads are formed on a die. A passivation layer is blanket deposited over the contact pads. The passivation layer is subsequently patterned to form first openings, the first openings exposing the contact pads. A buffer layer is blanket deposited over the passivation layer and the contact pads. The buffer layer is subsequently patterned to form second openings, the second opening exposing a first set of the contact pads. First conductive pillars are formed in the second openings. Conductive lines are formed over the buffer layer simultaneously with the first conductive pillars, ends of the conductive lines terminating with the first conductive pillars. An external connector structure is formed over the first conductive pillars and the conductive lines, the first conductive pillars electrically coupling the contact pads to the external connector structure.

Stacked semiconductor devices and methods of forming same

A package structure including IPD and method of forming the same are provided. The package structure includes a die, an encapsulant laterally encapsulating the die, a first RDL structure disposed on the encapsulant and the die, an IPD disposed on the first RDL structure and an underfill layer. The IPD includes a substrate, a first connector on a first side of the substrate and electrically connected to the first RDL structure, a guard structure on a second side of the substrate opposite to the first side and laterally surrounding a connector region, and a second connector disposed within the connector region and electrically connected to a conductive via embedded in the substrate. The underfill layer is disposed to at least fill a space between the first side of the IPD and the first RDL structure. The underfill layer is separated from the connector region by the guard structure.

Package structure including IPD and method of forming the same

Embodiments provide a high aspect ratio via for coupling a top electrode of a vertically oriented component to the substrate, where the top electrode of the component is coupled to the via by a conductive bridge, and where the bottom electrode of the component is coupled to substrate. Some embodiments provide for mounting the component by a component wafer and separating the components while mounted to the substrate. Some embodiments provide for mounting individual components to the substrate.

Via for component electrode connection

A package structure and the manufacturing method thereof are provided. The package structure includes a first package including at least one first semiconductor die encapsulated in an insulating encapsulation and through insulator vias electrically connected to the at least one first semiconductor die, a second package including at least one second semiconductor die and conductive pads electrically connected to the at least one second semiconductor die, and solder joints located between the first package and the second package. The through insulator vias are encapsulated in the insulating encapsulation. The first package and the second package are electrically connected through the solder joints. A maximum size of the solder joints is greater than a maximum size of the through insulator vias measuring along a horizontal direction, and is greater than or substantially equal to a maximum size of the conductive pads measuring along the horizontal direction.

Package structure and manufacturing method thereof

A method of manufacturing a semiconductor package includes forming an encapsulated semiconductor device and forming a redistribution structure over the encapsulated semiconductor device, where the encapsulated semiconductor device includes a semiconductor device encapsulated by an encapsulating material. Forming the redistribution structure includes forming a first dielectric layer on the encapsulated semiconductor device, and forming a first redistribution circuit layer on the first dielectric layer by a plating process carried out at a current density of substantially 4˜6 amperes per square decimeter, where the first dielectric layer comprises a first via opening. An upper surface of the first redistribution circuit layer filling the first via opening is substantially coplanar with an upper surface of the rest of the first redistribution circuit layer.

Growing community of inventors

Hsinchu, Taiwan

Der-Chyang Yeh