Industrial Technology Research Institute

Der-Chin Wu

Ching-Hsi Lin

Dimitre Zahariev Dimitrov

Chung-Wen Lan

A method for forming a solar cell with selective emitters is disclosed, including selectively removing a portion of a barrier layer on a substrate to form an opening, performing a texture etching process to the substrate to form a second texture structure in a second region under the opening of the barrier layer, wherein the substrate surface in the first region does not change from the first texture structure. The first texture structure and the second texture structure include a plurality of protruding portions and recessing portions. The distance between neighboring protruding portions of the first texture structure is L, the distance between neighboring protruding portions of the second texture structure is L, and Lis 2&#x2dc;20 times that of L. The method for forming a solar cell with selective emitters further comprises removing the barrier layer and performing a doping process.

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Tainan, Taiwan

Der-Chin Wu