Samsung Electronics Co., Ltd.

Deok-sung Hwang

Chul Ho Lee

Hyeong-sun Hong

Jae-man Yoon

Bong-Soo Kim

Makoto Yoshida

Kwang-youl Chun

A vertical type integrated circuit device includes a substrate and a pillar vertically protruding from the substrate. The pillar includes a lower impurity region and an upper impurity region therein and a vertical channel region therebetween. A portion of the pillar including the lower impurity region therein includes a mesa laterally extending therefrom. The device further includes a first conductive line extending on a first sidewall of the pillar and electrically contacting the lower impurity region, and a second conductive line extending on a second sidewall of the pillar adjacent the vertical channel region. The second conductive line extends in a direction perpendicular to the first conductive line and is spaced apart from the mesa. Related devices and methods of fabrication are also discussed.

Vertical type integrated circuit devices and memory devices including conductive lines supported by Mesa structures and methods of fabricating the same

Provided is a trench-type capacitor. To form the capacitor, first and second active regions are disposed in a semiconductor substrate. Node patterns are disposed in the first active region. Each node pattern may have a conductive pattern and an insulating pattern, which are sequentially stacked. Impurity diffusion regions are disposed in the vicinity of the node patterns. Substrate connection patterns in electrical contact with the first and second active regions are disposed. Node connection patterns in electrical contact with the node patterns are disposed in the vicinity of the first and second active regions. In addition, a semiconductor device having the trench-type capacitor and a semiconductor module having the semiconductor device is provided.

Trench-type capacitor, semiconductor device having the same, and semiconductor module having the semiconductor device

Growing community of inventors

Yongin-si, South Korea

Deok-sung Hwang