Imec Vzw

Universiteit Gent

Denys Nikolayev

Carolina Mora Lopez

Alexandru Andrei

Luc Martens

Wout Joseph

Emmeric Tanghe

A method includes providing a first electrically conductive element over a top surface of a substrate. The method includes measuring at least one parameter indicative of the shape or dimensions of the first electrically conductive element. The method includes simulating the first electrically conductive element and a dielectric wall surrounding the first electrically conductive element for a plurality of wall heights by using the at least one parameter as an input. The method includes for each wall height, computing the maximum current density present at a surface of the first electrically conductive element. The method includes determining, from the maximum current densities, wall height(s) for which the maximum current density is below a threshold. Furthermore, the method includes providing a second electrically conductive element, identical to the first electrically conductive element, surrounded by a wall having a wall height of the determined wall height(s).

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Lviv, Ukraine

Denys Nikolayev