Asml Netherlands B.v.

Koninklijke Philips Corporation N.v.

Dennis Andreas Petrus Hubertina Houben

Marcel François Heertjes

Wilhelmus Franciscus Johannes Simons

Ramidin Izair Kamidi

Yin Tim Tso

Jeffrey Hendrikus Peter Maria Goossens

Mark Constant Johannes Baggen

Petrus Marinus Christianus Maria Van Den Biggelaar

Marinus Jacobus Gerardus Van De Molengraft

Constant Paul Marie Jozef Baggen

A controller for a positioning device is constructed and arranged to receive a position signal indicative of a position of the positioning device, compare the position signal to a set-point signal indicative of a desired position of the positioning device to obtain an error signal, selectively modify the error signal based on the amplitude and the frequency content of the error signal to obtain a modified error signal, generate a control signal for controlling the positioning device on the basis of the modified error signal. The controller may be applied to control a positioning device in a lithographic apparatus.

Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

In a lithographic apparatus, a feedforward transfer function of a control system is determined by: a) iteratively learning a feedforward output signal of the control system by iterative learning control for a given setpoint signal; b) determining a relation between the learned feedforward output signal and the setpoint signal; and c) applying the relation as the feedforward transfer function of the control system. A learned feedforward, which has been learned for one or more specific setpoint signals only, can be adapted to provide a setpoint signal dependent feedforward output signal. The learned feedforward can be made more robust against setpoint variations.

Lithographic apparatus and device manufacturing method

In a method for controlling a positioning device, the positioning device has a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain. The positioning device, including the position sensor and the controller, defines a control loop. For error signals having a magnitude in a predefined range, the gain is selectively set to a value higher than a value for error signals having a magnitude outside the range.

Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device

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Rothem, Netherlands

Dennis Andreas Petrus Hubertina Houben