Robert Boschgmbh

Denis Kunz

Richard Fix

Philipp Nolte

Andreas Krauss

Kathy Sahner

Markus Widenmeyer

Alexander Martin

Robert Roelver

Thorsten Ochs

Martin Schreivogel

Andreas Letsch

Dirk Liemersdorf

Katrin Luckert

Wolfgang Menesklou

A method for producing a gas sensor device for detecting a gaseous analyte includes providing a sensor body comprising a semiconductor substrate, in which a cavity section is shaped, and a solid electrolyte layer arranged at a surface of the substrate. The electrolyte layer is not covered by the substrate in the cavity section. The method includes producing a signal conductor layer deposited dry-chemically at a substrate side of the sensor body, such that, in the region of the electrolyte layer not covered by the substrate in the cavity section, a cutout section is shaped in the signal conductor layer, in which the signal conductor layer is removed or not deposited. The method includes applying measuring electrodes to the electrolyte layer by a wet-chemical process. One measuring electrode is arranged in the cutout section and one measuring electrode is arranged on an electrolyte layer side of the sensor body.

Method for producing a gas sensor device for detecting at least one gaseous analyte, and gas sensor device for detecting at least one gaseous analyte

A sensor device for detecting and/or measuring gases includes two electrodes. A thin-layered proton-conductive material is fitted between the two electrodes. The gas can be detected and/or measured by a proton gradient that arises due to different gas concentrations.

Micromechanical sensor device

A microelectrochemical sensor includes an energy supply unit and a sensor unit. The energy supply unit is configured to generate electrical energy using a reference fluid. The sensor unit is configured to determine a concentration difference of a chemical species between a measuring fluid and the reference fluid. The measuring fluid has an unknown concentration of the species, and the reference fluid has a known concentration of the species. The sensor unit is electrically connected to the energy supply unit and is designed to determine the concentration difference using the electrical energy from the energy supply unit.

Microelectrochemical sensor and method for operating a microelectrochemical sensor

A device, a method, and a use thereof for detecting a concentration of a gas or of a gas component. The device as a gas sensor includes at least one sensor element including a gas-sensitive layer and a heating element for heating the gas-sensitive layer. The heating element is able to heat the sensitive layer to a desired temperature prior to the detection and/or is able to maintain it at a desired temperature during the detection. The heating element allows the gas-sensitive layer to be outgassed if needed, so as to allow absorption again. To heat the heating element, there is a first contacting to which a first voltage may be applied. Moreover, subsequent to the heating step, a second voltage may be applied to the sensor element or to the gas-sensitive layer for measured value detection with the aid of a second contacting. The two contactings at least partially have a shared actuation by being electrically connected to each other, the first contacting including a diode which essentially blocks current from flowing through the heating element when the second voltage, in particular the polarity of the second voltage, is applied.

Gas sensor

A microelectrochemical sensor includes a carrier material composed of a semiconductor substrate, and includes a chemosensitive sensor element. The chemosensitive sensor element is positioned in a first partial region of the carrier material. A heating element is positioned in a region of the chemosensitive sensor element and is configured to regulate a temperature of the chemosensitive sensor element. A microelectronic unit is positioned in a second partial region of the carrier material, and is connected to the chemosensitive sensor element and the heating element via conductor tracks integrated into the carrier material. The microelectronic unit is configured to operate the heating element and the sensor element.

A sensor device for sensing a gas includes a sensing region, and a readout region that is electrically and mechanically connected to the sensing region by way of a connecting web. The readout region, the sensing region, and the connecting web are formed from a substrate, and are isolated from the substrate by a clearance cutout. The sensing region has an ion-conducting region configured to provide a measuring signal dependent on the gas. The readout region (is configured to read out the measuring signal.

Sensor device for sensing a gas, method for operating a sensor device for sensing a gas and production method for a sensor device for sensing a gas

A microelectrochemical sensor having a diaphragm, a web, a first and a second electrode. The diaphragm is permeable to ions of a chemical species, is arranged transversely with respect to a cutout in a base body, and closes off the cutout in a fluid-tight fashion. The web is arranged on a first side of the diaphragm between a first partial surface and a second partial surface, and is designed to adjust a temperature of the diaphragm to an operating temperature using electrical energy. The first electrode has a first partial electrode and a second partial electrode, is permeable to fluid, and is arranged on the first side of the diaphragm. The web prevents electrical contact between the first electrode and the diaphragm. The second electrode has a third partial electrode and a fourth partial electrode, is also permeable to fluid, and is arranged on a second side of the diaphragm.

A sensor element for the qualitative and/or quantitative detection of a gas includes a front electrode configured to be exposed to the gas to be measured, a back electrode, and an electrically insulating layer positioned between front electrode and back electrode. The front electrode and the back electrode can be electrically contact connected to an AC voltage source for a qualitative and/or quantitative detection of a gas. The electrically insulating layer is at least locally polarizable in such a way that in a polarized state the electrically insulating layer has a relative permittivity which is lower than in a non-polarized state by a factor in a range of greater than or equal to 1.1.

Sensor element and method for detecting a gas

A gas-sensitive semiconductor device having a semiconductive channel () which is delimited by a first () and a second () channel electrode, and having a gate electrode () which is associated with the channel and which cooperates with the channel in such a way that a change in conductivity of the channel () occurs as a response to an action of a gas. The gate electrode () and/or a gate insulation layer () which insulates the gate electrode from the channel, and/or a gate stack layer () which may be provided between the gate electrode and the channel have/has two surface sections () which differ in their sensitivity to gases.

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Untergruppenbach, Germany

Denis Kunz