Robert Boschgmbh

Denis Gugel

Guenther-Nino-Carlo Ullrich

Markus Linck-Lescanne

Antoine Puygranier

Johannes Classen

Frank Schatz

Sebastian Guenther

Timm Hoehr

Rolf Scheben

Christian Doering

Benny Pekka Herzogenrath

Klaus Walter

Janpeter Wolff

Andreas Arlt

Rudy Eid

Wolfgang Koetzle

Monika Koster

Thomas Kaden

Jan Waldmann

Paeivi Lehtonen

Thomas Suenner

Tim Behrens

Reinhard Nopper

Michael Jaax

Stefan Leopold

A micromechanical sensor system that includes a mass that is deflectable at least in the z direction. A stop element having an elastic design is situated on the mass on at least one of the sides oriented in the z direction, via a connection element.

Micromechanical sensor system

A micromechanical sensor, including: a substrate; a movable mass element sensitive in three spatial directions; two x-lateral electrodes for detecting a lateral x-deflection of the movable mass element; two y-lateral electrodes for detecting a lateral y-deflection of the movable mass element; z-electrodes for detecting a z-deflection of the movable mass element; each lateral electrode being fastened on the substrate with the aid of a fastening element; the fastening elements of all electrodes being formed close to a connection element of the movable mass element to the substrate.

Micromechanical sensor and method for manufacturing a micromechanical sensor

A microelectromechanical component including, vertically at a distance from one another, a substrate device, a first, a second, and a third functional layer, a vertical stop being formed between the second and third functional layer, the vertical stop having a stop area on a surface of the second functional layer facing the third functional layer, wherein the second functional layer is connected to the first functional layer in a connecting area allocated to the stop area.

Microelectromechanical component

A micromechanical structure for an acceleration sensor includes a movable seismic mass including electrodes, the seismic mass being attached to a substrate with the aid of an attachment element; first fixed counter electrodes attached to a first carrier plate; and second fixed counter electrodes attached to a second carrier plate, where the counter electrodes, together with the electrodes, are situated nested in one another in a sensing plane of the micromechanical structure, and where the carrier plates are situated nested in one another in a plane below the sensing plane, each being attached to a central area of the substrate with the aid of an attachment element.

Micromechanical structure for an acceleration sensor

A micromechanical z-acceleration sensor, including a seismic mass element including a torsion spring; the torsion spring including an anchor element, with the aid of which the torsion spring is connected to a substrate; the torsion spring being connected at both ends to the seismic mass element with the aid of a bar-shaped connecting element designed as normal with respect to the torsion spring in the plane of the seismic mass element.

Micromechanical z-acceleration sensor

An electronic assembly includes a leadframe (), a semiconductor component (), and an electrically conductive connecting element () made of a composite material (). The connecting element () has a solderable metallization () on the composite material () on a surface that is directed towards the semiconductor component (). A thermal conductivity of the composite material () of the connecting element () is greater than a thermal conductivity of the semiconductor component () and less than a thermal conductivity of the leadframe (). The connecting element () is provided only locally in the region of the semiconductor component ().

Electronic assembly with improved thermal management

A system for detecting a magnetic flux includes: a magnetic-flux-generating coil having a first and second excitation-track elements extending essentially parallel to a reference plane; a flux-conducting structure for guiding the produced magnetic flux; and a flux-detecting coil having a first detection-track element for measuring at least a portion of the produced magnetic flux, the first detection-track element extending in a first plane defined by the first and second excitation-track elements between the first and the second excitation-track elements. The projection of the excitation-track elements of the flux-generating coil onto a projection plane extending parallel to the reference plane essentially covers the projection of the flux-conducting structure onto the projection plane, at least in the region of the windings of the flux-generating coil.

Coil design for miniaturized fluxgate sensors

A sensor system includes: an at least partially magnetoelastic deformation element for measuring pressures, caused by a fluid, that are able to be applied to the magnetoelastic deformation element; and a magnetic circuit formed via a magnetic flux feedback and having a sensor unit and an evaluation unit. The sensor unit is positioned at the deformation element and the evaluation unit having an evaluation coil is structurally separated from, yet inductively coupled to, the sensor unit. The sensor unit has a sensor coil positioned on the deformation element and the evaluation unit has the evaluation coil that is inductively coupled to the sensor coil, the sensor coil forms a resonant circuit, using its own parasitic capacitance or using an additional capacitance, which is able to be energized by the evaluation coil in free resonance with strong or weak inductive coupling by a magnetic circuit enclosing the two coils.

Sensor system having a magnetoelastic deformation element

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Dusslingen, Germany

Denis Gugel