Nanomedical Diagnostics, Inc.

Cardea Bio, Inc.

Deng Pan

Brett R Goldsmith

Mitchell Lerner

Savannah J Afsahi

Embodiments of the disclosed technology include patterning a graphene sheet for biosensor and electronic applications using lithographic patterning techniques. More specifically, the present disclosure is directed towards the method of patterning a graphene sheet with a hard mask metal layer. The hard mask metal layer may include an inert metal, which may protect the graphene sheet from being contaminated or damaged during the patterning process.

Providing a temporary protective layer on a graphene sheet

Patterning graphene with a hard mask coating

The present disclosure is directed towards systems and methods for transferring graphene from the surface of one substrate to another. In one particular embodiment, the graphene layer is grown on a surface of a first substrate, where the bottom of the first substrate is then affixed to the surface of a second substrate. The second substrate may include material made of a rigid or semi-rigid composition to provide structural support and backing to the first substrate. The graphene layer may then be delaminated from the first substrate and transferred to a target surface, such as the surface of an electronic device or biosensor.

Systems and methods for transferring graphene

The present disclosure is directed towards systems for transferring graphene from the surface of one substrate to another. In one particular embodiment, the graphene layer is grown on a surface of a first substrate, where the bottom of the first substrate is then affixed to the surface of a second substrate. The second substrate may include material made of a rigid or semi-rigid composition to provide structural support and backing to the first substrate. The graphene layer may then be delaminated from the first substrate and transferred to a target surface, such as the surface of an electronic device or biosensor.

Systems for transferring graphene

Embodiments of the disclosed technology include depositing a passivation layer onto a surface of a wafer that may include a graphene layer. The passivation layer may protect and isolate the graphene layer from electrical and chemical conditions that may damage the graphene layer. As such, the passivation layer may further protect the graphene sensor from being damaged and impaired for its intended use. Additionally, the passivation layer may be patterned to expose select areas of the graphene layer below the passivation layer, thus creating graphene wells and exposing the graphene layer to the appropriate chemicals and solutions.

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San Diego, CA, United States of America

Deng Pan