Fusion Systems Corporation

Delroy O Walker

James D Hill

Robert D Wooten

John C Egermeier

Janet Ellzey

Joseph Zihmer

Christopher J Garmer

Demetri P Telionis

Danny Furches

A SMIF system for transferring semiconductor wafers between two controlled environments, one being within a wafer cassette carrier and the other being within an enclosure around a wafer processing apparatus. In a carrier loading position, a carrier door rests on a port door which forms part of a platform for vertically fixing and horizontally moving the cassette within the enclosure. A carrier cover, when unlocked from the carrier door, is engageable by a port plate for vertical movement therewith as an elevator mechanism moves the port plate between down and up positions. In the down position, the port door closes an enclosure opening defined by the port plate. In the up position, the port plate raises the carrier cover to allow access to the wafers in the cassette by an article processing apparatus. External and internal panels carried by the port plate cause the controlled environment of the enclosure to be extended to include a compartment containing the uncovered cassette. The cassette platform also rotates to position the cassette relative to the article processing apparatus.

System for transferring articles between controlled environments

Apparatus for cooling the lamp envelope of an electrodeless lamp which includes a conduit for carrying cooling gas into the vicinity of the lamp envelope and directing the cooling gas towards the lamp envelope through a slotted orifice in a wall of the conduit. The slotted orifice is preferably oriented with its long dimension substantially perpendicular to the conduct orifice and substantially parallel to the axis of a rotating lamp envelope.

Method and apparatus for cooling electrodeless lamps

A reaction chamber for performing a chemical vapor deposition process wherein the window through which the light must pass is prevented from becoming clouded. The chamber is divided by baffles into a reactant zone, a buffer zone, and a window zone, and the momentum flux densities of the gases flowing in the respective zones are about matched. Additionally, discontinuities are provided on the walls of the reactor to impede diffusion of the reactant gas towards the window.

Reaction chamber having non-clouded window

An instrument for measuring radiation including a probe for collecting light. The probe includes a diffusive reflective surface at the forward end of the probe and an aperture block containing a pair of apertures to direct light reflected from the reflector to an optical waveguide and then to a light sensor and display unit.

Growing community of inventors

Hyattsville, MD, United States of America

Delroy O Walker