Honeywell G.m.b.h.

Other

Deidrich J Saathoff

Robert D Horning

Thomas George Stratton

James Kevin Carney

David W Burns

G Benjamin Hocker

Scott A McPherson

Akintunde I Akinwande

Hanumanthiyna V Venkatasetty

Amir R Mirza

Hanumanthiya V Venkatasetty

This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragms made of silicon, either single crystal or polycrystalline in form, although other materials may be used.

Method for making diaphragm-based sensors and apparatus constructed

Low temperature wafer bonding process enhancement makes a wafer surface hydrophobic, preparing it with a buffered oxide etchant and then exposing it to H.sub.2 O.sub.2 before thermoelectric bonding. Has particular application to diaphragm-based pressure sensor construction.

Wafer bonding enhancement technique

The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all of a plurality of diaphragms may be bonded to only one wafter having a cavity adjacent the diaphragm.

Diaphragm-based-sensors

The discharge rate and internal conductivity of electrochemical cell including a lithium anode, and a cathode and an electrolyte including LiAlCl.sub.4 and SOCl.sub.2 is improved by the addition of an amount of a mixture containing AlCl.sub.3 and Butyl Pyridinium Chloride.

Lithium thionyl chloride battery

An electrolyte for use in rechargeable electrochemical cells having a lithium electrode and a depolarizer which includes an electrochemically active amount of LiAsF.sub.6 dissolved in tetrahydrofuran and a rechargeability improving amount of LiI contained therein to form an electrolyte solution, said solution being capable of passing through a molecular sieve of less than 5 Angstroms. A preferred embodiment includes a 1 molar solution of the LiAsF.sub.6 and from about 0.8 to 1.4 molar solution of LiI.

Rechargeable electrochemical cell

An electrolyte solution for use in rechargeable electrochemical cells having nickel substrate as working electrode and lithium counter electrode and an electrochemically active amount of LiAsF.sub.6 dissolved in dimethyl sulfite and a rechargeability improving amount of lithium carbonate, Li.sub.2 CO.sub.3, contained therein to form electrolyte solution, said solution being capable of passing through a molecular sieve of less than about 5 Angstroms has been developed. A preferred embodiment includes a one molar solution of the LiAsF.sub.6 and from about 0.07 to 0.14 molar solution of Li.sub.2 CO.sub.3. The electrolyte solution has 85-90 percent efficiency for cycling lithium on nickel substrate.

Growing community of inventors

Burnsville, MN, United States of America

Deidrich J Saathoff