University of Illinois

Uchicago Argonne, LLC

Microlution Inc.

Deepkishore Mukhopadhyay

Placid M Ferreira

John A Rogers

Jin Wang

Daniel Lopez

Donald A Walko

Jang-Ung Park

Gopal Shenoy

Il-Woong Jung

Andrew Honegger

Andrew Gordon Phillip

Jingyan Dong

Abhinandan Tulsian

Elizabeth Creighton

Provided are high-resolution electrohydrodynamic inkjet (e-jet) printing systems and related methods for printing functional materials on a substrate surface. In an embodiment, a nozzle with an ejection orifice that dispenses a printing fluid faces a surface that is to be printed. The nozzle is electrically connected to a voltage source that applies an electric charge to the fluid in the nozzle to controllably deposit the printing fluid on the surface. In an aspect, a nozzle that dispenses printing fluid has a small ejection orifice, such as an orifice with an area less than 700 &#x3bc;mand is capable of printing nanofeatures or microfeatures. In an embodiment the nozzle is an integrated-electrode nozzle system that is directly connected to an electrode and a counter-electrode. The systems and methods provide printing resolutions that can encompass the sub-micron range.

High resolution electrohydrodynamic jet printing for manufacturing systems

A method and apparatus are provided for implementing Bragg-diffraction leveraged modulation of X-ray pulses using MicroElectroMechanical systems (MEMS) based diffractive optics. An oscillating crystalline MEMS device generates a controllable time-window for diffraction of the incident X-ray radiation. The Bragg-diffraction leveraged modulation of X-ray pulses includes isolating a particular pulse, spatially separating individual pulses, and spreading a single pulse from an X-ray pulse-train.

Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics

A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.

Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

A machine tool having an automatic tool changer (ATC). The machine tool includes a gantry, a spindle extending from the gantry, a configurable work area, and an ATC adjacent to a front wall of the machine tool. The ATC includes a rotary tool magazine and a plurality of receptacles oriented radially around the rotary tool magazine configured to hold a plurality of cutting tools having cutting edges. The cutting edges of the cutting tools point radially inwardly around the rotary tool magazine, and the cutting tools are removed directly from the automatic tool changer by the spindle and brought to a part to be machined. A tool sensor may be located between the ATC and the spindle to take measurements of the cutting tool. The ATC includes at least one receptacle configured to hold a cutting tool.

Machine tool with automatic tool changer

MEMS stages comprising a plurality of comb drive actuators provide micro and up to nano-positioning capability. Flexure hinges and folded springs that operably connect the actuator to a movable end stage provide independent motion from each of the actuators that minimizes unwanted off-axis displacement, particularly for three-dimensional movement of a cantilever. Also provided are methods for using and making MEMS stages. In an aspect, a process provides a unitary MEMS stage made from a silicon-on-insulator wafer that avoids any post-fabrication assembly steps. Further provided are various devices that incorporate any of the stages disclosed herein, such as devices requiring accurate positioning systems in applications including scanning probe microscopy, E-jet printing, near-field optic sensing, cell probing and material characterization.

High precision silicon-on-insulator MEMS parallel kinematic stages

Growing community of inventors

Chicago, IL, United States of America

Deepkishore Mukhopadhyay