Hrl Laboratories, LLC

Other

Raytheon Company

Raytehon Company

Deborah J Kirby

David T Chang

Hung P Nguyen

Raviv Perahia

Randall Lynn Kubena

Logan D Sorenson

Richard J Joyce

Daniel J Gregoire

Frederic P Stratton

Terence J De Lyon

Yook-Kong Yong

Jeffery J Puschell

Geoffrey P McKnight

James H Schaffner

Ryan G Quarfoth

Andrew T Hunter

David W Shahan

Lian X Huang

Metin S Mangir

Jennifer J Zinck

Michael Aidan Gritz

Jar Jueh Lee

Ryan T Freeman

Geoffrey P Mcknight

Srikanth S Iyer

Randy L Kubena

Tracy J Boden

Hung Nguyen

A resonator includes a piezoelectric layer comprising a piezoelectric material, the piezoelectric layer having a first surface and a second surface; an inner electrode disposed on the first surface of the piezoelectric layer, the inner electrode connected to a circuit; and an outer electrode surrounding the inner electrode on the first surface of the piezoelectric layer, the outer electrode left floating or connected to ground. The inner electrode and the outer electrode are separated by at least one gap smaller than an acoustic wavelength. One single piece electrode or multiple piece electrodes may be disposed on the second surface of the piezoelectric layer. The outer electrodes are configured for optimal modal confinement of an acoustic resonance while the inner electrodes are configured to produce a higher motional resistance than the interconnect resistance for maintaining high Q.

Piezoelectric resonator with multiple electrode sections

An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

High stability angular sensor

A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.

Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite

A MEMS resonator comprising a baseplate wafer; a piezoelectric HF-VHF resonator that comprises a monolithic piezoelectric member having at least two separate spring piezoelectric support members integrally extending therefrom, each spring piezoelectric support member having at least a rounded corner; said piezoelectric resonator being attached to the baseplate wafer by said support members; wherein said monolithic piezoelectric member comprises first and second main surfaces joined by side edges; at least one of said side edges forming an angle of between 90 and 105 degrees with one of the first and second main surfaces.

HF-VHF quartz MEMS resonator

A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

High dynamic range gyroscope

A system configured to provide thermal regulation and vibration isolation to one or more electronic components. The system includes a sensor chassis defining an interior chamber, an electronics housing in the interior chamber of the sensor chassis, a thermoelectric cooler coupled between the sensor chassis and the electronics housing, a thermal strap coupled to the sensor chassis, and at least one isolator coupled to the sensor chassis. The system may also include an insulating material, such as Aerogel, in the interior chamber of the sensor chassis and extending around the electronics housing.

Thermal regulation and vibration isolation system

A geopositioning system. The geopositioning system includes an accelerometer including three sensing axes, a gyroscope including three sensing axes, and a magnetometer including three sensing axes, and a processing circuit. The processing circuit is configured to calculate a location of the geopositioning system as a latitude, longitude, and altitude with respect to the Earth.

Gyromagnetic geopositioning system

An angular sensor. The angular sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first pair of normal modes including a first normal mode and a second normal mode and a second pair of normal modes including a third normal mode and a fourth normal mode. The angular sensor further includes a coarse readout circuit configured to drive the first pair of modes, measure the motion of the first pair of modes, and derive from the measured motion of the first pair of modes a coarse measurement of an angular rate of the resonator. The angular sensor further includes and a fine readout circuit configured to derive a measurement of the difference between the true angular rate of the resonator and the coarse measurement.

A gyroscope includes a cylindrical shell having a first end and a second end, a pedestal, a plurality of spokes coupled from the pedestal to the second end of the cylindrical shell, and a plurality of tuning tabs extending from one or more of the plurality of spokes.

Gyroscope frequency tuning tabs on support spokes

A phononic travelling wave gyroscope. The gyroscope includes a phononic waveguide including at least one loop. The phase change incurred by phonons propagating around the loop is compared to a reference phase, and utilized to form an estimate of the rotational rate of the gyroscope.

Phononic travelling wave gyroscope

A piezoelectric quartz shear-mode resonator includes plasma etched quartz tethers, each including a mount. The tethers are for mounting the resonator to a semiconductor substrate for the purpose of isolating the thermally-induced stress from the mounts from the active resonating region, wherein the quartz tethers have rounded corners.

Rounded and curved integrated tethers for quartz resonators

A magnetometer has a resonating structure which is naturally resonant in at least first and second resonant modes, a resonant frequency of the second mode being at least an order of magnitude greater than a resonant frequency of the first mode, the resonating structure having two sense electrodes disposed on opposing major surfaces of the resonating structure and having a conductive path formed as a loop, the loop being disposed near or at edges of the resonating structure and the two sense electrodes being formed inwardly of the edges of the resonating structure and also inwardly of said loop. First and second oscillators are provided, the first oscillator being coupled to the loop for applying an oscillating current to the loop, the oscillating current having a frequency essentially equal to the resonant frequency of the first mode of the resonating structure, the second oscillator being coupled to said sense electrodes, the second oscillator oscillating with a fundamental frequency corresponding to the resonant frequency of the second mode of the resonating structure, the second oscillator also producing sidebands indicative of the magnetometer sensing an external magnetic field.

Growing community of inventors

Calabasas, CA, United States of America

Deborah J Kirby