Microvision, Inc.

Seiko Epson Corporation

Dean R Brown

Wyatt Owen Davis

Jason B Tauscher

Randall Brian Sprague

Mark P Helsel

Thomas W Montague

John R Lewis

Matthew Ellis

Hakan Urey

Mathew David Watson

Margaret K Brown

Richard Allen James

Roeland Collet

David Roy Bowman

Stephen R Willey

Jun Yan

Yunfei Ma

Quinn William Haynie

Chancellor W Brown

Yujiro Nomura

Joshua Mark Hudman

Nobumasa Abe

Yoshiro Koga

Utku Baran

Gregory T Gibson

Matthieu Saracco

Kelly D Linden

Michael E Sherwood

John Wyatt Coy

David Malametz

Gabriel Castro

The embodiments described herein provide microelectromechanical system (MEMS) scanners with increased resistance to distortion in the mirror surface. Such MEMS scanners, when incorporated into laser scanning devices, are used to reflect laser light into a pattern of scan lines. Thus, by reducing distortion in the scanning surface these MEMS scanners can provide improved performance in scanning laser devices, including scanning laser projectors and laser depth scanners. In general, this is accomplished by providing a MEMS scanner where the connection to the scan plate is made at an intermediate support structure, and at a point on that intermediate support structure that is offset from the scanning surface. Providing the connection to the scan plate at points offset from the scanning surface can reduce the distortion that occurs in the scanning surface as a result of rotational forces in the MEMS scanner.

Microelectromechanical systems (MEMS) scanners for scanning laser devices

Scanning platforms for use in scanning laser devices are described herein. These scanning platforms are particularly applicable to scanning laser devices that use microelectromechanical system (MEMS) structures to facilitate mirror motion. The scanning platforms include a centrally located stationary mount portion and a movable portion that surrounds the stationary portion. The movable portion is configured to be coupled to a mirror and to facilitate motion of that mirror. Such a scanning platform can facilitate reduced size in scanning mirror assembly, and thus can facilitate a more compact scanning laser device.

Scanning platforms for scanning laser devices

A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.

MEMS device with multi-segment flexures

A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density.

Piezoelectric actuated device, method and system

Briefly, in accordance with one or more embodiments, a piezoresistive stress sensor comprises a plurality of piezoresistive elements coupled in a bridge circuit disposed on, near, or contiguous to a flexure to detect torsional flexing about an axis of the flexure. The bridge circuit has at least two nodes disposed along the axis of the flexure and at least two nodes disposed off the axis of the flexure to maximize, or nearly maximize, an output of the bridge circuit in response to the torsional flexing of the flexure. A torsional flexing component of the output signal of the bridge circuit is relatively increased with respect to a component of the output signal generated by non-torsional stress of the flexure, or a component of the output signal generated by non-torsional stress of the flexure is reduced with respect to the torsional flexing component of the output signal, or combinations thereof.

Piezoresistive sensors for MEMS device having rejection of undesired motion

Briefly, in accordance with one or more embodiments, an electric comb drive scanner comprises a scanning body comprising a mirror supported by one or more flexures along a first axis and one or more support structures coupled to the one or more flexures. One or more drive combs are disposed on the one or more support structures, wherein the drive combs cause the mirror to rotate about the first axis in response to a drive signal applied to the drive combs. The one or more support structures are tuned to reduce non-uniformity of warping of the support structures to reduce variation in disengagement of the drive combs along a length of the drive combs.

Tuned support structures for electrostatic comb drive scanner

A magnetically actuated system includes a conductor and a magnetic field apparatus to generate a magnetic field. The magnetic field apparatus includes magnets and magnetically permeable materials to focus the magnetic field in areas of the conductor that produce a drive torque when the conductor carries a current.

Magnetically actuated system

Briefly, in accordance with one or more embodiments, a scanning platform to scan a beam as a projected image comprises a frame and a scanning mirror supported by a flexure coupled to the frame of the scanning platform. The flexure has an asymmetric structure comprising a longer flexure arm and a shorter flexure arm to locate the scanning mirror at a position offset from a center of the frame. The resonant frequency of oscillation of the scanning mirror may be maintained or otherwise determined by selecting an appropriate cross-sectional area of the longer flexure arm or the shorter flexure arm, or combinations thereof.

Scanning platform having asymmetric flexures

Briefly, in accordance with one or more embodiments, a scanner for a scanned beam display may comprise a scanning platform having a mirror disposed thereon to reflect a beam of light impinging on the mirror, a drive coil disposed on the scanning platform to scan the reflected beam of light in response to a drive current applied to the drive coil. The drive coil has coil winding segments having a narrower width in one or more regions of the drive coil, and has coil winding segments having a greater width in one or more other regions of the drive coil to provide a the drive coil with a reduced electrical resistance.

Electromagnetic scanner having variable coil width

A microelectromechanical system (MEMS) includes a conductor with improved reliability. The conductor flexes with a moving member in the MEMS device, and the improved reliability is achieved through material selections that provides increased fatigue resistance, reduced crack propagation, and/or mechanisms for improved live at a given strain level. The conductor may include a single material, or may include layers of different materials.

Fatigue resistant MEMS apparatus and system

A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.

Two-mirror scanning system

Briefly, in accordance with one or more embodiments, a scanning module for a scanner system comprises a frame having a first section and a second section. The first section of the frame is capable of receiving a laser to secure the laser in the first section, and the second section of the frame is capable of receiving a MEMS device having a mirror, to secure the MEMS device in the first section. The laser is aligned with the mirror by the frame to cause light emitted from the laser to impinge upon the mirror during operation of the laser. Such an arrangement may facilitate the physical and/or electrical assembly of the components of the scanner system.

Scanning module for a scanner system having a MEMS device or the like

A scanned light display system includes a light source operable to emit light and a curved mirror positioned to receive at least a portion of the light. The curved mirror is configured to substantially collimate the received light. The substantially collimated light is scanned to form an image by moving at least one of the light source and the curved mirror relative to each other. Alternatively, the scanned light display system includes a light source operable to emit light, a curved mirror positioned to receive some of the light, and an optical element positioned to receive light reflected from the curved mirror. The optical element is configured to substantially collimate the reflected light. The substantially collimated light is scanned to form an image by moving at least one of the light source, the curved mirror, and the optical element. Scanning mirror assemblies and methods of making are also disclosed.

Scanned light display system using large numerical aperture light source, method of using same, and method of making scanning mirror assemblies

Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may be driven in a non-resonant mode of operation. The drive signal provided to the MEMS device may be tailored to prevent the MEMS device from exhibiting resonance characteristics and to cause the MEMS device to operate non-resonantly. In one or more embodiments, a filter may be used to tailor the frequency components of the drive signal, for example to sufficiently attenuate frequency components at or near the resonant frequency of the drive signal. A direct current signal may be provided to the MEMS device to provide an offset to scanned light beam for example to provide beam steering, and the sweep range and/or sweep frequency may be adjusted for example to steer the scanning field of view off axis from the user pointing axis.

Growing community of inventors

Lynnwood, WA, United States of America

Dean R Brown