Michigan State University

University of Michigan

Sentec Corporation

Dean M Aslam

Yuping Lin

Takeo Sawatari

Alex Klooster

Edward T Zellers

James M Marks

Yang Lu

Sondes Sahli

A device for accumulation of vapor analytes incorporating nanotubes grown by CVD is described. The devices are used in sensors and as a preconcentrator for a gas chromatograph.

Analyte accumulation device

The fiber optic pressure sensing system includes a sensor housing formed using MEMS processing. The sensor housing has ribs and grooves in both horizontal and vertical directions relative to the surface to allow the membrane to flex in a consistent manner. The flexing of the membrane allows the pedestal to be repeatedly positioned in response to pressure acting on the extension of the sensor head and membrane.

Ultra-miniature optical pressure sensing system

A miniature piezoresistive sensor includes an undoped single crystal and a doped diamond film deposited by a chemical vapor deposition process on the undoped polycrystalline diamond and having a single crystal grain size of about 1 micron to 1 millimeter. The sensor preferably includes metal contacts in contact with the doped film. The resistance of the sensor varies as a function of strain on the doped diamond film transmitted through the single grain. This inexpensive highly-sensitive sensor can be used for sensing pressure, acceleration, strain or weight. It can also be used as a thermistor.

Electronic device and method of use thereof

Growing community of inventors

Okemos, MI, United States of America

Dean M Aslam