Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 132,083 patents)
1 patent:
1. 6827629 - Method of and apparatus for controlling the chemical mechanical polishing of multiple layers on a substrate