Applied Materials, Inc.

Dayal Ramachandran

Bindusagar Marath Sankarathodi

Stephen Moffatt

Abhilash J Mayur

Kartik Bhupendra Shah

Wolfgang R Aderhold

Kartik Santhanam

Maxim Shaposhnikov

Eugene Lobanov

Boris Axelrod

Amritha Rammohan

Embodiments disclosed herein include methods of processing substrates in a tool. In an embodiment, the method of processing the substrate in the tool, comprises receiving an augmented recipe with a machine learning (ML) and/or an artificial intelligence (AI) module. In an embodiment, the augmented recipe comprises, a recipe for processing the substrate in the tool, and a matrix identifier that corresponds to one or more substrate properties. In an embodiment the method further comprises using the ML and/or AI module to retrieve a data set from a database, where the data set is associated with the matrix identifier, and using the ML and/or AI module to modify the augmented recipe to form a modified recipe, where the modification is dependent on the data set.

Coded substrate material identifier communication tool

Display screen or portion thereof with graphical user interface

Growing community of inventors

Sunnyvale, CA, United States of America

Dayal Ramachandran