Pnc Process Systems Co., Ltd.

Ultron Semiconductor (shanghai) Co., Ltd.

Schneider Toshiba Inverter Europe Sas

Dawei Liu

Ming Xu

Panpan Li

Fangyi Lv

Chuanlong Liu

Zhengkai Lu

Zhe Li

Jing Zhang

Jie Wang

Yuan Jiang

Yingqiang Wang

Yilin Shen

Xinlai Chen

A method of controlling mixed liquid to be delivered for SPM solution includes: before the SPM solution comes into an acid scouring tank, mixing the sulfuric acid with the hydrogen peroxide in a delivering pipe in a first stage and a second stage in turn, so as to make a mixed liquid after mixing in the first stage to further get mixed in the second stage; heating the mixed liquid in the first stage; monitoring an oxygen concentration value of the mixed liquid flowing out after mixing in the first stage; and if the oxygen concentration value is smaller than an oxygen concentration value at full reaction, adding supplementary sulfuric acid and hydrogen peroxide during mixing in the second stage, so as to enable the oxygen concentration value of the mixed liquid flowing out after mixing in the second stage monitored in real time to reach an oxygen concentration value.

Method of controlling mixed liquid to be delivered for SPM solution

A liquid delivering system for wafer cleaning equipment includes an acid scouring tank, a sulfuric acid supplying source, a hydrogen peroxide supplying source, a first mixing device, a second mixing device and a feedback-control panel. The first mixing device and the second mixing device both includes a mixing duct, a multi-section mixing screw rod arranged inside the mixing duct and a heater wrapped around the mixing duct. By ways of adopting the above-mentioned technical solution, it is possible to realize fully mixing sulfuric acid with hydrogen peroxide in a mode of mixing in multi-stages, achieve precise control to temperature, and enable mixed liquid to fully react, thereby ensuring that the mixed liquid coming into the acid scouring tank meets cleaning requirements, and improving quality and efficiency of cleaning wafers.

Liquid delivering system for wafer cleaning equipment

The object of the present application is to ensure the security of a device when a precharging relay is not closed and a load current passes through a precharging resistor, so as to ensure the customer's security. Provided is a security control method for a system with a precharging circuit, comprising: giving out an error alarm and stopping operating the system when the number of times of undervoltage of a precharging circuit achieves m times and the duration between the first undervoltage and the mth undervoltage is less than or equal to &#x3c4; seconds, where m and &#x3c4; are positive integers. Compared with the previous method, the present invention has the following advantages of no danger of combustion and high reliability; and cost saving and no need of adding additional hardware.

Safety control method and device for system with precharging circuit, and system thereof

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Shanghai, China

Dawei Liu