Intel Corporation

Taiwan Semiconductor Manufacturing Comp. Ltd.

David Zhou

Songnan Yang

Yung-Hsiang Chen

Hong W Wong

Wah Yiu Kwong

Xiaoguo Liang

Chung-Yi Ho

Systems, apparatuses and methods may provide for a wireless charging system that includes a charge circuit and a housing configuration having a substantially conical outer profile. Additionally, one or more charge coils may be positioned within the housing configuration and coupled to the charge circuit, wherein the one or more charge coils define a charge field direction that is perpendicular to the substantially conical outer profile. In one example, the housing configuration includes a plurality of segments arranged in a stacked configuration.

Conical wireless charging station

An apparatus for a chuck having particle recesses is provided. In some embodiments, the chuck includes a plurality of impressions and a particle recess. The impressions of the plurality of impressions are laterally spaced and extend into the chuck from a top surface of the chuck to a base surface of the chuck. The base surface of the chuck defines bottom surfaces respectively of the impressions and is spaced between the top surface of the chuck and a bottom surface of the chuck. The particle recess extends in to the chuck from the top surface of the chuck to a location spaced between the base surface of the chuck and the bottom surface of the chuck. In particular, the particle recess is configured to underlie a workpiece alignment mark of a workpiece.

Wafer table chuck having a particle recess

Growing community of inventors

Shanghai, China

David Zhou