University of Minnesota

Rosemount Inc.

Rosemont Inc.

David Y Pui

Benjamin Y Liu

Da-Ren Chen

David B Kittelson

Daniel F Dolan

Douglas C Myhre

Heinz Fissan

Richard J O'Brien

Yi Liu

Chuen-Jinn Tsai

Christof Asbach

Larry V Miller

An apparatus includes semiconductor processing equipment. A particle detecting integrated circuit is positioned in a vacuum environment, the particle detecting integrated circuit containing a device having a pair of conductive lines exposed to the vacuum environment. The pair of conductive lines is spaced at a critical pitch corresponding to diameters of particles of interest. A computer system is linked to the particle detecting integrated circuit to detect a change in an electrical property of the conductive lines when a particle becomes lodged between or on the lines.

Real-time monitoring of particles in semiconductor vacuum environment

A method for use in neutralizing a charged discharge includes providing a neutralizer housing having a longitudinal axis extending between an inlet and an outlet thereof. A charged discharge is introduced into the inlet of the neutralizer housing for flow parallel to the inlet of the longitudinal axis from the inlet to the outlet. An alternating electric field is created within the housing parallel to the longitudinal axis for directing bursts of negatively charged ions and positively charged ions alternately towards the inlet for use in neutralizing the charged discharge. An apparatus for carrying out this method is also described.

Charged particle neutralizing apparatus and method of neutralizing

A method of introducing biological material into cells includes providing one or more target cells and establishing a spray of substantially dispersed particles including biological material. The substantially dispersed particles have an electrical charge applied thereto such that one or more of the substantially dispersed particles of the spray is introduced into one or more of the target cells. The spray of substantially dispersed particles may be established by dispensing a spray of microdroplets suspending particles. The electrical charge is concentrated on the suspended particles as the microdroplet evaporates. The suspended particles may include carrier particles with biological material or the suspended particles may be particles of biological material alone. The space charge effect of the concentrated electrical charge on the substantially dispersed particles of the spray enable one or more of the particles to be introduced into one or more of the target cells.

Electrospraying apparatus and method for introducing material into cells

Neutralizing a charged discharge includes providing a neutralizer housing having a longitudinal axis extending between an inlet and an outlet of the neutralizer housing. A charged discharge having a first polarity is introduced into the inlet of the neutralizer housing for flow parallel to the longitudinal axis from the inlet to the outlet. A stream of ions having a second polarity opposite the first polarity is directed to flow parallel to the longitudinal axis of the neutralizer housing towards the inlet for use in neutralizing the charged discharge. An electrode configuration is operable to create an electric field within the neutralizer housing for use in directing the stream of ions to flow parallel to the longitudinal axis of the neutralizer housing towards the inlet.

A method for charging of aerosol particles includes providing a charger housing having a longitudinal axis extending between an inlet and an outlet of the charger housing with a stream of aerosol particles flowing parallel to the longitudinal axis from the inlet to the outlet. A confined electric field is created within the housing parallel to the longitudinal axis for directing a stream of unipolar ions to flow parallel to the longitudinal axis of the charger housing towards the outlet for use in charging the stream of aerosol particles. To further reduce charged particle loss within the charger housing, a clean sheath may be created between the stream of aerosol particles and the charger housing, an outlet electric field may be created proximate the outlet of the charger housing such that charged particles are forced towards the longitudinal axis, and/or the stream of aerosol is contracted proximate the outlet of the charger housing forcing the charged particles toward the longitudinal axis. Apparatus for carrying out the method is also described.

Particle charging apparatus and method of charging particles

A purging air flow system that causes air to pass over a pyrometer lens or window to keep it clean and free from particulate contaminants has an annular, continuous slot for air inlet around the periphery of the lens to permit flow of air across the lens without any obstructions in the path of flow inwardly from the outer edge of the lens. An asymmetric flow pattern is established across the lens surface, either by having a differential size slot at different peripheral portions of the peripheral edge of the lens or window, or by providing a radial swirl about the axis of the window so that when the air goes through the slot, the tangential velocity creates a moving asymmetric flow pattern on the window surface.

Window purging system for a combustion instrument

A radiation instrument has a purging air flow system for passing air over the lens to keep it clean and free from particulate contaminants and also for providing a positive flow of air away from the lens. The air supply used for such purging is controlled adequately so the flow changes direction and particles are removed from the main flow of purge air by inertial separation prior to the time the air contacts the lens. Such air entrained particles might otherwise deposit on the lens. A flow control orifice provides a secondary flow to carry the particles separated from the main flow out of the flow passageway.

Purge air system for a combustion instrument

Apparatus for controlling particulate emissions from a combustion apparatus, such as a diesel engine. Diesel engine exhaust particles are electrically charged during the formation of the particles in the engine combustion chambers. A particle collector is used to collect the electrically charged particles on collecting structures connected to a high voltage power supply and ground. The collecting structures of the particle collector can be a plurality of parallel metal plates, spaced cylindrical rods, or concentrically located cylindrical members. A fibrous matrix can be located adjacent the particle collecting structure to collect the charged particles as they move through the matrix. In one embodiment, the collected particles separate from the collecting structures and return to the engine intake. In another embodiment, a removable collecting cartridge has electrically conductive plates for collecting the charged particles. The entire cartridge is removed for cleaning or replacement. The hot exhaust gas from the engine can be used to oxidize the collected particles. The collected particles that are not oxidized can be separated from the collecting structures and re-entrained into the gas. The re-entrained particles are larger than the particles formed in the combustion apparatus. The large particles can be removed by a downstream particle collection device.

Apparatus for reducing particles discharged by combustion means

The method and apparatus for controlling particulate emissions from a combustion apparatus, as a diesel engine. Diesel engine exhaust particles are electrically charged during the formation of the particles in the engine combustion chamber. A particle collector is used to collect the electrically charged particles on collecting structures connected to a high voltage power supply and ground. The collecting structures of the particle collector can be a plurality of parallel metal plates, spaced cylindrical rods, or concentrically located cylindrical members. A fibrous matrix can be located adjacent the particle collecting structure to collect the charged particles as they move through the matrix. In one embodiment, the collected particles separate from the collecting structures and return to the engine intake. In another embodiment, a removable collecting cartridge has electrically conductive plates for collecting the charged particles. The entire cartridge is removed for cleaning or replacement. The hot exhaust gas from the engine can be used to oxidize the collected particles. The collected particles that are not oxidized can be separated from the collecting structures and re-entrained into the gas. The re-entrained particles are larger than the particles formed in the combustion apparatus. The large particles can be removed by a downstream particle collection device or mixed with fuel for the engine.

Method of recycling collected exhaust particles

Apparatus for recycling collected exhaust particles

The method and apparatus for controlling particulate emissions from a combustion apparatus, as a diesel engine. Diesel engine exhaust particles are electrically charged during the formation of the particles in the engine combustion chambers. A particle collector is used to collect the electrically charged particles on collecting structures connected to a high voltage power supply and ground. The collecting structures of the particle collector can be a plurality of parallel metal plates, spaced cylindrical rods, or concentrically located cylindrical members. A fibrous matrix can be located adjacent the particle collecting structure to collect the charged particles as they move through the matrix. In one embodiment, the collected particles separate from the collecting structures and return to the engine intake. In another embodiment, a removable collecting cartridge has electrically conductive plates for collecting the charged particles. The entire cartridge is removed for cleaning or replacement. The hot exhaust gas from the engine can be used to oxidize the collected particles. The collected particles that are not oxidized can be separated from the collecting structures and re-entrained into the gas. The re-entrained particles are larger than the particles formed in the combustion apparatus. The large particles can be removed by a downstream particle collection device.

Growing community of inventors

Plymouth, MN, United States of America

David Y Pui