Mykrolis Corporation

David W Stockbower

Peter V Kimball

Iraj Gashgaee

Geoffrey W Kaiser

A plating tool cell anode for venting unwanted gases from a fluid plating solution. In a first embodiment, the solution is introduced into a chamber, defined by the plating tool cell (), by fluid inlet () and contacts the anode (). The fluid encounters a hydrophobic membrane () and a hydrophilic membrane () spaced from the hydrophobic membrane. A driving force, such as a vacuum, is applied to the gap () between the membranes to remove unwanted gases therein. In a second embodiment, a single membrane is used that is both hydrophobic and hydrophilic. Preferably, the hydrophobic portion of the membrane is located at or near the perimeter of the chamber and gas to be vented is directed toward the hydrophobic portion(s).

Hydrophobic and hydrophilic membranes to vent trapped gases in a plating cell

A plating cell base design that utilizes a single connection that provides both fluid communication and electrical communication to the cell. The design eliminates many of the components previously necessary to effectuate fluid and electrical seals. With fewer connections, material cost is reduced, reliability is enhanced, and downtime is reduced.

Growing community of inventors

Burlington, MA, United States of America

David W Stockbower