Sandia Corporation

National Technology & Engineering Solutions of Sandia, LLC

Sandia National Laboratories

David W Chandler

Kevin E Strecker

A Khai Luong

Kimberlee Chiyoko Celio

Carl C Hayden

A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.

Apparatus, method and system for imaging and utilization of SEM charged particles

In an embodiment, a dual-etalon cavity-ring-down frequency-comb spectrometer system is described. A broad band light source is split into two beams. One beam travels through a first etalon and a sample under test, while the other beam travels through a second etalon, and the two beams are recombined onto a single detector. If the free spectral ranges ('FSR') of the two etalons are not identical, the interference pattern at the detector will consist of a series of beat frequencies. By monitoring these beat frequencies, optical frequencies where light is absorbed may be determined.

Dual-etalon cavity ring-down frequency-comb spectroscopy with broad band light source

Photons emitted from a sample responsive to being excited by laser pulses are directed through a prism onto a photomultiplier tube having several spaced-apart anodes. The prism alters the path of each photon as a function of its wavelength so that the wavelength determines the anode to which the photon is directed. Taps of first and second delay lines that are coupled to respective alternating anodes. When an anode receives the photon, it generates a pulse that propagates through the delay line in opposite directions from its associated tap. A timer determines first and second times from the laser pulse to the pulse reaching the first and second ends of the delay line. The difference between the first and second times corresponds to the wavelength of the emitted photon and the sum of the first and second times corresponds to the emission delay of the emitted photon.

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Livermore, CA, United States of America

David W Chandler