Resonetics, Inc.

Walleye Technologies, Inc.

Varian Semiconductor Equipment Associates, Inc.

Techtronic Power Tools Technology Limited

Other

David S Holbrook

Christopher P Adams

David L Wall

Pascal Miller

Matthew J Mergener

John S Scott

Jeffrey Charles Hessenberger

Scott D Bublitz

Kenneth Todd McDaniel

Terence Sean Sullivan

Mark Huggins

Sergey V Broude

Brian W Hall

Brent N Gregorich

William Leavitt

Jason Porter Whitmire

Clifford A Lardin

Umesh Rajani

Rong Gu

Kenneth T Mcdaniel

A laser machining system for machining a work-piece includes a laser scanning head, external optical subsystems, and an image acquisition device. The external optical subsystems correspond to optical channels that include a first optical channel and a second optical channel. The laser scanning head controls an optical path so that a laser beam is directed and focused on the work-piece through the first optical channel and the second optical channel at different times. The first optical channel and the second optical channel correspond to respective specific portions of the work-piece to be machined by the laser beam. The image acquisition device is positioned to view the work-piece through the optical path. The image acquisition device acquires via the first optical channel one or more images of the work-piece to determine a displacement of the work-piece with reference to a best optical focus position of the second optical channel.

Laser machining system and method for machining three-dimensional objects from a plurality of directions

In one aspect, the present invention provides an imager, preferably portable, that includes a source of electromagnetic radiation capable of generating radiation with one or more frequencies in a range of about 1 GHz to about 2000 GHz. An optical system that is optically coupled to the source focuses radiation received therefrom onto an object plane, and directs at least a portion of the focused radiation propagating back from the object plane onto an image plane. The imager further includes a scan mechanism coupled to the optical system for controlling thereof so as to move the focused radiation over the object plane. A detector optically coupled to the lens at the image plane detects at least a portion of the radiation propagating back from a plurality of scanned locations in the object plane, thereby generating a detection signal. A processor that is in communication with the detector generates an image of at least a portion of the object plane based on the detection signal.

Electromagnetic scanning imager

In one aspect, a measurement system is disclosed that includes a source of microwave radiation having one or more wavelengths capable of penetrating through a visibly opaque obstruction, e.g., a wall. The source can be movably positioned on one side of the obstruction for illuminating thereof. The system can further include a microwave reflecting element disposed on another side of the obstruction, where the reflecting element is capable of reflecting at least a portion of the radiation transmitted through the obstruction. A plurality of radiation sensors are positioned relative to the obstruction so as to differentially detect at least a portion of the reflected radiation transmitted through the obstruction so as to determine a position of the source relative to the reflective element.

Microwave datum tool

Embodiments of the present invention are directed to methods and systems for laser micro-machining, which may include dividing a long line illumination field into a plurality of individual fields, wherein each of the plurality of fields includes an aspect ratio of about 4:1 or greater, directing the plurality of individual fields onto at least one mask, wherein each individual field illuminates a corresponding area on the mask and translating the mask and/or workpiece relative to one another along a scan axis.

Apparatus for minimizing a heat affected zone during laser micro-machining

Embodiments of the present invention are directed to methods and systems for micromachining a conical surface. In one embodiment, such a system may include a rotating platform for receiving a long line of laser illumination, a mask having a predetermined pattern comprising a sector of a planar ring, the mask being positioned on the rotating platform, a workpiece stage having a rotational axis for rotating a removably-affixed workpiece comprising a conical surface, wherein the sector comprises the planar image of the conical surface, an excimer laser for producing a laser beam, a homogenizer for homogenizing the laser beam in at least a single direction, at least one condenser lens, a turning mirror and at least one projection lens.

Method and apparatus for laser micromachining a conical surface

An apparatus and method of determining location of an object hidden from view. The apparatus includes an imaging tool for detecting hidden objects. The imaging tool includes a housing including a first end and a second end, a display supported by the first end of the housing, and a tracking device supported by the second end of the housing. The imaging tool also includes a transmitter supported by the housing and operable to transmit electromagnetic radiation toward a hidden target, an analysis module supported by the housing and operable to analyze feedback data related to the interaction between the target and the electromagnetic radiation, and an image module operable to receive data from the analysis module to generate an image on the display.

Apparatus and method of determining location of an object

Methods and apparatus are provided for automatically tuning a charged particle beam system, such as an ion implanter. In one embodiment, a control parameter of a control component located upstream of a target component is modulated, and the beam current downstream of the target component is measured. The beam current measurements provide information that is used to evaluate tuning and, if necessary, to adjust the target component. The target component is typically a slow response component, such as a magnet. In another embodiment, evaluation of tuning is performed by modulating the target parameter and monitoring the effect of such modulation on the beam current. In a further embodiment, the spot size of the charged particle beam is evaluated by scanning the beam across the edge of an aperture and evaluating the sharpness of the beam focus. The tuning algorithms are preferably implemented in localized power supply interfaces for high speed operation.

Method and apparatus for tuning ion implanters

Embodiments of the present invention are directed to an illuminating optical device for forming a field of illumination. The optical device includes a first one-dimensional homogenizer positioned to homogenize a first dimension/axis of the field of illumination and a second one-dimensional homogenizer positioned to homogenize a second dimension/axis of the field of illumination.

Methods and apparatuses for homogenizing light

The invention relates to an entangled-photon apparatus capable of measuring particular characteristics of an optical element, device or channel and further capable of correcting for the effects of these characteristics in an optical communications signal propagating through the same optical element. The apparatus includes a source of entangled photons (twinons), which are injected into the device under test along with the communications signal, and a two branch quantum interference device (QID) for determining the state of entanglement of the photons after they pass through the device. The QID includes a variable delay element that is incremented to equalize the twinon correlation in the two branches of the QID. A second variable delay element, slaved to the first, applies the corresponding compensation to the communications signal.

Optical characteristic measurement and compensation apparatus and method

A system for correcting eccentricity and rotational error of a substantially circular workpiece, in which the workpiece is moved to a workstation, using a translating device. The rotational position and position of the workpiece center is determined. There is a rotatable member at the workstation, having a home position and a center. The rotatable member is pre-rotated from its home position an amount sufficient to correct workpiece rotational error. The translating device is caused to place the workpiece on the rotatable member such that the workpiece center is at a known position relative to the center of the rotatable member, to correct eccentricity. The rotatable member is then rotated back to its home position, to correct rotational error.

Growing community of inventors

Lexington, MA, United States of America

David S Holbrook