Analog Devices,inc.

David Rohan

Padraig Fitzgerald

Raymond C Goggin

Mark Schirmer

Jo-ey Wong

John Dixon

Raymond Goggin

A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

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County Limerick, Ireland

David Rohan