Lucent Technologies Inc.

Tellium, Inc.

Kla Tencor Corporation

Howard Hughes Medical Institute

Kla-tencor Technologies Corporation

Agere Systems Guardian Corp.

Metconnex Canada Inc.

David Reese Peale

Utpal Kumar Chakrabarti

Harald F Hess

Nicolas H Bonadeo

Igal M Brener

Shi-Sheng Lee

Thomas Ducellier

George J Zydzik

Kyle A Brown

Patrick T Lee

Keren Bergman

Kenneth Jeffrey Hayworth

Dieter Mueller

Ming-Ju Tsai

Mohiuddin Mala

Alan Hnatiw

Lih Lin

Carlos A Duran

Afshin Partovi

Chauhan Daniel Lee

C Shan Xu

Kophu Chiang

Cherry Ann Murray

Jerry I Dadap, Jr

Walter Framski

Ming Chou

Sangtae Park

Patrick Breckow Chu

Hsi-jen J Yeh

Leslie C Hopkins

A microscopy system includes a gas cluster beam system configured for generating a beam of gas clusters directed toward a sample to irradiate a sample and mill away successive surface layers from the sample, a scanning electron microscope system configured for irradiating the successive surface layers of the sample with an electron beam and for imaging the successive surface layers of the sample in response to the irradiation of the surface layer, and a processor configured for generating a three dimensional image of the sample based on the imaging of the successive layers of the sample.

Volume scanning electron microscopy of serial thick tissue sections with gas cluster milling

A microtome includes a blade located at an end of a trough that defines a cavity for holding a liquid; a sample block in which the at least one sample is suspended, the sample block is moveable relative to the blade such that when the sample block is passed across the blade a section is cut from the sample block; a plate that includes a support frame that defines an opening, and a transparent film extending across the opening, the transparent film being transparent to electrons, a grasper being configured to receive and retain the plate, wherein the grasper is moveable relative to the blade; and a pusher section that lacks the sample pusher section.

Sectioning volume samples

In one embodiment, a radiation based analysis system comprises a first radiation source to generate first radiation having a wavelength outside the visible spectrum, a second radiation source to generate second radiation having a wavelength within the visible spectrum, and a waveguide coupler to couple a portion of the first radiation and a portion of the second radiation into a combined radiation beam such that the first radiation and the second radiation follow a path that is substantially coaxial.

Integrated visible pilot beam for non-visible optical waveguide devices

Runout characterization is performed on a moving body by positioning a light source and optical sensor at a nominal distance from the moving body, with a beam directed from the light source against a surface of the moving body. The reflected light is detected at a sampling rate with the optical sensor as the moving body moves, and a data stream of the measurements over time is stored. In the case where an interferometer is used as the optical sensor, relative distance measurements are made. The data stream is analyzed to detect repeating signatures in the data stream, where the signatures represent features on the surface of the moving body. At least one of the features is selected as a reference, and the data stream is processed into segments based on the reference, where each segment represents one period of motion of the moving body. The data segments are overlaid on top of each other to produce ordered sets of data points within the segments. Each ordered set of data points is individually averaged and reported as repeatable runout. The average of each ordered set of data points is subtracted from the data points of each set to produce normalized ordered sets of data points. The variances within the normalized ordered sets of data points are reported as a measure of the non-repeatable runout of the moving body.

Runout characterization

A multi-port planar evanescent coupler having N inputs and M outputs, where both N and M are each no less than three, formed of combinations of at least one of at least one planar evanescent 2&#xd7;2 coupler and at least one planar evanescent 3&#xd7;3 coupler subunits, with phase shifting segments in selected waveguides disposed between the planar evanescent coupler subunits. The multi-port planar evanescent coupler can be used in phase measurement and detection devices, such as interferometers, optical receivers, and laser gyroscopes.

Evanescent waveguide couplers

The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational articulated hinge at a first end, and having a 1-dimensional rotational articulated hinge at a second end opposite the first end; a movable cantilever connected to the mirror through the 1-dimensional rotational articulated hinge; a support structure connected to the mirror through the 2-dimensional rotational articulated hinge and connected to the movable cantilever; whereby movement of said movable cantilever causes rotation of the mirror in a first axis of rotation, and the mirror is also rotatable about a second torsional axis of rotation perpendicular to said first axis of rotation.

Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays

An optical switch includes a plurality of first optical fibers, a plurality of second optical fibers, a first MEMS array, and a second MEMS array. The first MEMS array is optically coupled with the first optical fibers to receive optical signals from the first optical fibers and to direct the optical signals, wherein the first MEMS array defines a first array incidence angle between a normal direction to the first MEMS array and a direction of the received optical signals. The second MEMS array is optically coupled with the first MEMS array to receive the directed optical signals and to re-direct the directed optical signals with the second optical fibers wherein the second MEMS array defines a second array incidence angle between a normal direction to second MEMS array and a direction of the re-directed optical signals. The configuration of the components is provided to provide reduced optical losses.

Optical switch having MEMS array with reduced optical loss

An interferometer that contains a tri-coupler to mix light from three different waveguides. The light is emitted from a light source and may be reflected from a test surface. The output of the tri-coupler may be three different light beams that have intensities 120 degrees out of phase from each other. The out-of-phase light beams may be detected by a plurality of photodetectors. The detected out-of-phase light beams may be used to determine a height of the test surface. The waveguides and tri-coupler provide a compact and relatively inexpensive interferometer.

Waveguide based parallel multi-phaseshift interferometry for high speed metrology, optical inspection, and non-contact sensing

A temperature control system is provided for an optical switch including steerable micro-mirrors. The system includes at least one sensor and associated sensing circuitry for measuring the temperature of a micro-mirror or a region of a substrate near a micro-mirror. The system also includes a controller that responds to a signal provided by the sensing circuitry. The controller response may include activating heating or cooling devices the region that is sensed to adjust the temperature of the region.

Temperature control of micro-mirrors of an optical switch substrate

An optical network element using steerable mirrors in an optical switch. A steerable mirror in the switch is connected to a potential bias having a magnitude greater than zero in order to reduce the operating potential of the integrated control system that steers the mirror.

Voltage reduction in integrated control systems of mirrors

A structure and method for an optical switch is provided that includes providing sidewall electrodes with steerable micro-mirrors to position and control micro-mirror movement. The structure and method includes using the sidewall electrodes in conjunction with electrodes underlying a micro-mirror to sense capacitance present between a micro-mirror and underlying electrodes and/or sidewall electrodes, and driving the electrodes underlying the micro-mirror and the sidewall electrodes to move the micro-mirror into an angular position. The electrode structures and methods of driving them may be used in systems with closed loop feedback control to reduce transient mirror settling time and provide substantial immunity to system perturbations when micro-mirrors switch an optical signal from an input fiber to an output fiber of the optical switch, or when a micro-mirror is held at an angular position over long time scales.

Sidewall electrodes for electrostatic actuation and capacitive sensing

A laser processing fixture is formed to allow for facet processing of cleaved laser bars, either individually, or allowing for multiple bars to be processed simultaneously. The fixture holds the bars at a precisely-controlled distance with respect to a predefined reference plane, and holds the bars rigidly enough so as to minimize the possibility of vibration, but not so forcefully as to cause damage. The fixture comprises a fixed jaw and a movable jaw, with a pair of spaced-apart support members extending between the jaws. One or more laser bars may then be positioned between the jaws such that the front and rear facets will be exposed above and below the jaws. Therefore, each facet may be processed without unloading and re-loading the bars in the fixture. The support members, which may comprise a pair of wires, are spaced a sufficient distance so as to be disposed beyond the location of any active device region. In an arrangement for processing multiple bars, the support members may be formed as rails (with or without vacuum pull-down slots) and spacer elements may be interposed between adjacent bars to prevent facet coatings from bridging between adjacent laser bars.

Laser processing fixture

A self-modulated solid state laser comprises an intracavity optical waveguide that supports a multiplicity of lasing filaments each at a different optical frequency. At least two of the filaments temporally beat with one another so as to modulate the intensity of the laser output. In accordance with one embodiment of our invention, the waveguide supports a multiplicity of transverse modes, and the laser includes a mode mixing mechanism that mixes the energy of at least two pairs of the modes, each coupled pair generating a separate filament. In an illustrative embodiment, the filaments are mode locked and the laser output is modulated at a frequency on the order of 1 THz.

Self-modulated, filament-based, solid state laser

Optical detection apparatus comprises a solid state laser having an intracavity optical waveguide that supports a lasing filament and operates in one of two states: (1) in a first state, the filament is fixed in one of two orientations, and (2) in a second state, the filament may be induced to switch or oscillate between the two orientations, or it may be suppressed altogether. At least one feature is located on the output facet off-center with respect to the waveguide cross-section in order to provide a preferred orientation for the filament. In one embodiment, a single feature is located off-center and optical radiation of one intensity is injected through the facet feature, thereby causing the laser to operate in one of its states, whereas injected radiation of another intensity causes the laser to operate in the other of its states. The injected radiation may be radiation emitted by the laser that is reflected by an object (e.g., a bit mark in an optical storage medium or a region of an integrated circuit being viewed under an optical microscope) proximate the facet feature (e.g., in the laser near-field). Alternatively, the injected radiation may originate from a transmitter in an optical communication system. In either case, any change in the state of the laser is detected as change in a parameter of the laser (e.g., a change in its impedance that is detected as a corresponding change in its terminal voltage). In an alternative embodiment, based on a differential mode of detection, a pair of facet features are located on opposite sides of the center of the waveguide's cross-section.

Filament-based, optical detection apparatus

An improved anvil tool for use in laser bar or wafer cleaving comprises a relatively small cross section such that the anvil does not overhang the device edges in any direction. In one embodiment, the surface of the tool contacting the laser wafer or bar is compliant and contains a laterally disposed slit that aligns with the scribe mark on the top surface of the material to be cleaved. The anvil may be formed as a columnar tool or as a film deposited on a substrate. The compliant surface may be removable and in a preferred embodiment may comprise a continuous feed membrane tape so that a &ldquo;clean&rdquo; surface is used for each subsequent cleave operation.

Growing community of inventors

Chatham, NJ, United States of America

David Reese Peale