Xsilogy Inc.

David R Baselt

Bernd Fruhberger

Sanjay V Patel

Erno Klaassen

Todd Mlsna

Robert J Warmack

Todd E Misna

A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Fixed parallel plate MEMS capacitor microsensor array

A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays

Sensors for determining the ambient amount (e.g., concentration) of a chemical (e.g., molecular hydrogen in a gas or vapor) are disclosed. Preferred embodiments of these sensors comprise a dense thin metal (e.g., palladium or a palladium alloy) film disposed on a microcantilever beam that is suspended above a stationary baseplate. The dense thin metal film is configured to absorb, for example, hydrogen, thereby causing the film to expand which in turn causes the microcantilever beam to deform. The deformation can be measured, for example, as a change in capacitance between the microcantilever beam and the stationary baseplate. The measured change in capacitance is indicative of the ambient hydrogen concentration.

Dense thin film-based chemical sensors and methods for making and using same

Fixed parallel plate MEMS capacitor microsensor and microsensor array and method of making same

A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

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San Diego, CA, United States of America

David R Baselt