Silicon Valley Group, Inc.

David Pap Rocki

Don Roy Sauer

Alexander H Slocum

Johann Tam

Matthew J Van Doren

Larry Gerszewski

A wafer gripper assembly comprises first and second gripping members movably supported relative to each other. A motor propels the gripping members linearly towards and away from each other. Preferably both gripping members are movably supported, and a rotary-to-linear translator produces equal and opposite linear movement of the gripping members. Typically, at least six contactor elements are defined on the pair of gripping members. The contactor elements include a vertically extending portion having an inwardly facing convex surface for contacting an edge of a wafer, and an inwardly extending flange for supporting a lower surface of the wafer.

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Pleasanton, CA, United States of America

David Pap Rocki