Sony Corporation

Materials Research Corporation

Praxair S.t. Technology, Inc.

David P Strauss

Paul S Gilman

Thomas J Hunt

Chi-Fung Lo

John Turn

A target assembly in which the sputtering material is not soldered or otherwise metallurgically bonded to a backing plate. Rather, the target, which is homogeneously manufactured of sputtering material, is mechanically coupled (e.g., with bolts) to an adapter, which is itself permanently affixed to the chamber. As a result, the target can be easily uncoupled from the chamber and replaced, without also requiring removal and replacement of a backing plate.

Mechanically joined sputtering target and adapter therefor

An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by enveloping the metal oxide powder in at least one layer of a barrier material while the powder is hot-pressed using a graphite die assembly.

Method for making metal oxide sputtering targets (barrier powder

Growing community of inventors

Glen Rock, NJ, United States of America

David P Strauss