Average Co-Inventor Count = 4.80
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Semitool, Inc. (2 from 382 patents)
2 patents:
1. 7313462 - Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces
2. 7198694 - Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems