Motorola Corporation

Freescale Semiconductor,inc.

Other

The University of Texas System

David P Mancini

Douglas J Resnick

William J Dauksher

Doug J Resnick

Steven M Smith

Robert W Baird

Karen Elizabeth Moore

Young Sir Chung

Steven R Young

Donald F Weston

Harland G Tompkins

Carlton Grant Willson

Kevin J Nordquist

Jaime A Quintero

Laura Popovich

Kathleen Ann Gehoski

In accordance with a specific embodiment, a method of processing a semiconductor substrate is disclosed whereby the substrate is thinned, and the dice formed on the substrate are singulated by a common process. Trench regions are formed on a backside of the substrate. An isotropic etch of the backside results in a thinning of the substrate while maintaining the depth of the trenches, thereby facilitating singulation of the die.

Ultra-thin die and method of fabricating same

This invention relates to semiconductor devices, microelectronic devices, micro electro mechanical devices, microfluidic devices, and more particularly to an improved lithographic template including a repaired defect, a method of fabricating the improved lithographic template, a method for repairing defects present in the template, and a method for making semiconductor devices with the improved lithographic template. The lithographic template () is formed having a relief structure () and a repaired gap defect () within the relief structure (). The template () is used in the fabrication of a semiconductor device () for affecting a pattern in device () by positioning the template () in close proximity to semiconductor device () having a radiation sensitive material formed thereon and applying a pressure to cause the radiation sensitive material to flow into the relief structure present on the template. Radiation is then applied through the template so as to further cure portions of the radiation sensitive material and further define the pattern in the radiation sensitive material. The template () is then removed to complete fabrication of semiconductor device ().

Lithographic template having a repaired gap defect method of repair and use

A novel device, such as a semiconductor device, a microfluidic device, a surface acoustic wave device an imprint template, or the like, including an amorphous carbon layer for improved adhesion of organic layers and method of fabrication. The device includes a substrate having a surface, an amorphous carbon layer, formed overlying the surface of the substrate, and a low surface energy material layer overlying the surface of the substrate. The device is formed by providing a substrate having a surface, depositing a low surface energy material layer and an amorphous carbon layer overlying the surface of the substrate adjacent the low surface energy material layer using plasma enhanced chemical vapor deposition (PECVD) or sputtering.

Device including an amorphous carbon layer for improved adhesion of organic layers and method of fabrication

This invention relates to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template () is formed having a substrate () and a charge dissipation layer (), and a patterned imageable relief layer, () formed on a surface () of the substrate () using radiation. The template () is used in the fabrication of a semiconductor device () for affecting a pattern in the device () by positioning () the template () in close proximity to semiconductor device () having a radiation sensitive material () formed thereon and applying a pressure () to cause the radiation sensitive material to flow into the relief image present on the template (). Radiation () is then applied through the template () to cure portions of the radiation sensitive material and define the pattern in the radiation sensitive material. The template () is then removed to complete fabrication of semiconductor device ().

Lithographic template and method of formation and use

This invention relates to semiconductor devices, microelectronic devices, microelectromechanical devices, microfluidic devices, photonic devices, and more particularly to a multi-tiered lithographic template, a method of forming the multi-tiered lithographic template and a method for forming devices with the multi-tiered lithographic template. The multi-tiered lithographic template (') is formed having a first relief structure and a second relief structure, thereby defining a multi-tiered relief image. The template is used in the fabrication of a semiconductor device () for affecting a pattern in device () by positioning the template in close proximity to semiconductor device () having a radiation sensitive material formed thereon and applying a pressure to cause the radiation sensitive material to flow into the multi-tiered relief image present on the template. Radiation is then applied through the multi-tiered template so as to further cure portions of the radiation sensitive material and further define the pattern in the radiation sensitive material. The multi-tiered template is then removed to complete fabrication of semiconductor device ().

Multi-tiered lithographic template and method of formation and use

An improved and novel method of forming a tiered structure, such as a T-gate structure, including the fabrication of a stabilized resist layer that provides for the prevention of interlayer intermixing with the deposition of subsequent resist layers. The method includes patterning a base resist layer to provide for an opening which will form the stem of the tiered structure and subsequently stabilizing the resist base layer without deforming the stem opening. Next, a resist stack is deposited on an uppermost surface of the stabilized resist layer. Patterning the resist stack provides for an opening on an uppermost layer or portion, and a reentrant profile in a portion of the resist stack adjacent the stabilized resist layer. Metallization and subsequent removal of the resist layers results in a tiered structure, such as a T-gate structure, formed using only low to medium molecular weight, linear polymeric materials such as those used in positive optical resists in optical lithography.

Method of fabricating a tiered structure using a multi-layered resist stack and use

An alignment mark ( ) is formed on the surface ( ) of a silicon carbide substrate ( ). The alignment mark ( ) is used to reflect a light signal ( ) to determine the proper position for the silicon carbide substrate ( ). The materials that are used to form the alignment mark ( ) can be used to form an alignment mark on any transparent or semi-transparent substrate and will maintain physical integrity through very high temperature processing steps.

Semiconductor device and method of making the same

The lithographic template is formed having a substrate, an optional etch stop layer formed on a surface of the substrate, and a patterning layer formed on a surface of the etch stop layer. The template is used in the fabrication of a semiconductor device for affecting a pattern in the device by positioning the template in close proximity to the semiconductor device having a radiation sensitive material formed thereon and applying a pressure to cause the radiation sensitive material to flow into the relief image present on the template. Radiation is then applied through the template so as to further cure portions of the radiation sensitive material and further define the pattern in the radiation sensitive material. The template is then removed to complete fabrication of the semiconductor device.

An improved and novel semiconductor device including an amorphous carbon layer for improved adhesion of photoresist and method of fabrication. The device includes a substrate having a surface, a carbon layer, formed on the surface of the substrate, and a resist layer formed on a surface of the carbon layer. The device is formed by providing a substrate having a surface, depositing a carbon layer on the surface of the substrate using plasma enhanced chemical vapor deposition (PECVD) or sputtering, and forming a resist layer on a surface of the carbon layer.

Amorphous carbon layer for improved adhesion of photoresist and method of fabrication

A method of contact printing on a device using a partially transparent mask ( ) having first and second surfaces, comprises the steps of applying a layer of low surface energy polymeric material ( ) to the first surface of the mask; placing the first surface ( ) of the mask contiguous to the device ( ), the layer of low surface energy polymeric material being substantially in contact with the device; and applying radiation ( ) to the second surface of the mask for affecting a pattern in the device.

Lithographic printing method using a low surface energy layer

This invention relates to semiconductor devices, microelectronic devices, micro electro mechanical devices, microfluidic devices, and more particularly to a lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template. The lithographic template ( ) is formed having a substrate ( ), an optional etch stop layer ( ) formed on a surface ( ) of the substrate ( ), and a patterning layer ( ) formed on a surface ( ) of the etch stop layer ( ). The template ( ) is used in the fabrication of a semiconductor device ( ) for affecting a pattern in device ( ) by positioning the template ( ) in close proximity to semiconductor device ( ) having a radiation sensitive material formed thereon and applying a pressure to cause the radiation sensitive material to flow into the relief image present on the template. Radiation is then applied through the template so as to further cure portions of the radiation sensitive material and further define the pattern in the radiation sensitive material. The template ( ) is then removed to complete fabrication of semiconductor device ( ).

An improved and novel semiconductor device including an amorphous carbon layer for improved adhesion of photoresist and method of fabrication. The device includes a substrate having a surface, a carbon layer formed on the surface of the substrate, and a resist layer formed on a surface of the carbon layer. The device is formed by providing a substrate having a surface, depositing a carbon layer on the surface of the substrate using plasma enhanced chemical vapor deposition (PECVD) or sputtering, and forming a resist layer on a surface of the carbon layer.

A method of contact printing on a device using a partially transparent mask (,) having first and second surfaces, comprises the steps of applying a layer of low surface energy polymeric material (,) to the first surface of the mask; placing the first surface (,) of the mask contiguous to the device (,), the layer of low surface energy polymeric material being substantially in contact with the device; and applying radiation (,) to the second surface of the mask for affecting a pattern in the device.

An alignment mark (51) is formed on the surface (64) of a silicon carbide substrate (50). The alignment mark (51) is used to reflect a light signal (72) to determine the proper position for the silicon carbide substrate (50). The materials that are used to form the alignment mark (51) can be used to form an alignment mark on any transparent or semi-transparent substrate and will maintain physical integrity through very high temperature processing steps.

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Fountain Hills, AZ, United States of America

David P Mancini