Average Co-Inventor Count = 2.50
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tel Fsi, Inc. (5 from 35 patents)
5 patents:
1. 9666456 - Method and apparatus for treating a workpiece with arrays of nozzles
2. 9412628 - Acid treatment strategies useful to fabricate microelectronic devices and precursors thereof
3. 8978675 - Method and apparatus for treating a workpiece with arrays of nozzles
4. 8967167 - Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids
5. 8668778 - Method of removing liquid from a barrier structure