Asml Netherlands B.v.

David O Dwyer

Petrus Wilhelmus Smorenburg

Gerrit Jacobus Hendrik Brussaard

An illumination source apparatus (), suitable for use in a metrology apparatus for the characterization of a structure on a substrate, the illumination source apparatus comprising: a high harmonic generation, HHG, medium (); a pump radiation source () operable to emit a beam of pump radiation (); and adjustable transformation optics () configured to adjustably transform the transverse spatial profile of the beam of pump radiation to produce a transformed beam () such that relative to the centre axis of the transformed beam, a central region of the transformed beam has substantially zero intensity and an outer region which is radially outwards from the centre axis of the transformed beam has a non-zero intensity, wherein the transformed beam is arranged to excite the HHG medium so as to generate high harmonic radiation (), wherein the location of said outer region is dependent on an adjustment setting of the adjustable transformation optics.

Illumination source for an inspection apparatus, inspection apparatus and inspection method

Methods and corresponding apparatus operable to cause an interaction between a drive radiation beam and a medium for generation of emitted radiation by high harmonic generation, the arrangement comprising: an interaction region positioned at an interaction plane and configured to receive the medium; a beam block positioned upstream of the interaction plane at a beam block plane and configured to partially block the drive radiation beam; a beam shaper positioned upstream of the beam block plane at an object plane and configured to control a spatial distribution of the drive radiation beam; and at least one lens positioned upstream of the interaction plane and downstream of the beam block plane, wherein the lens being positioned such that an image of the spatial distribution of the drive radiation beam is formed at the interaction plane.

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Eindhoven, Netherlands

David O Dwyer