Mks Instruments, Inc.

David Menzer

Jesse E Ambrosina

Jack J Schuss

Feng Tian

Souheil Benzerrouk

Ilya Bystryak

David Lam

Abdul Rashid

Siddharth P Nagarkatti

Siddarth Nagarkatti

A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.

Method and system for controlling radio frequency power

Growing community of inventors

Boxford, MA, United States of America

David Menzer