Novellus Systems Incorporated

David Mark Dinneen

Steven T Mayer

Jingbin Feng

Eric G Webb

R Marshall Stowell

Edmund Minshall

Avishai Kepten

John B Alexy

Christopher M Bartlett

Richard K Lyons

Mark T Winslow

Norman D Kaplan

A main reservoir holds cool reactant liquid. A reaction vessel for treating a substrate is connected to the main reservoir by a feed conduit. A heater is configured to heat reactant liquid in the feed conduit before the liquid enters the reaction vessel. Preferably, the heater is a microwave heater. A recycle conduit connects the reaction vessel with the main reservoir. Preferably, a recycle cooler cools reactant liquid in the recycle conduit before the liquid returns to the main reservoir. Preferably, an accumulation vessel is integrated in the feed conduit for accumulating, heating, conditioning and monitoring reactant liquid before it enters the reaction vessel. Preferably, a recycle accumulator vessel is integrated in the recycle conduit to accommodate reactant liquid as it empties out of the reaction vessel.

Electroless plating-liquid system

Growing community of inventors

Portland, OR, United States of America

David Mark Dinneen