Perkinelmer Health Sciences, Inc.

Therma-wave, Inc.

The United States of America As Represented by the United States

Kla Tencor Corporation

Flir Systems, Incorporated

David M Aikens

Joseph L DiCesare

Timothy P Neal

Mahsa Farsad

David Y Wang

Gregory A Hanlon

Richard Edwards

Youxian Wen

Walter Lee Smith

Feng Jin

Lawrence D Rotter

Bruce L Cannon

Joel Ng

James Lee Hendrix

Ian M Thomas

Jianhui Chen

Michael A Nichols

James Richard Kerr

Mark R Kozlowski

Michael E Fossey

David W Camp

Craig Kiikka

Lynn M Sheehan

John J McDonald

Gregory Hanlon

A spectrometer with a Schmidt reflector is described. The spectrometer may include a Schmidt corrector and a dispersive element as separate components. Alternatively, the Schmidt corrector and dispersive element may be combined into a single optical component. The spectrometer may further include a field-flattener lens.

Compact spectrometers and instruments including them

Spectrometers include an optical assembly with optical elements arranged to receive light from a light source and direct the light along a light path to a multi-element detector, dispersing light of different wavelengths to different spatial locations on the multi-element detector. The optical assembly includes: (i) a collimator arranged in the light path to receive the light from the light source, the collimator including a mirror having a freeform surface; (2) a dispersive sub-assembly including an echelle grating, the dispersive sub-assembly being arranged in the light path to receive light from the collimator; and (3) a Schmidt telescope arranged in the light path to receive light from the dispersive sub-assembly and focus the light to a field, the multi-element detector being arranged at the field.

Echelle spectrometer

Certain configurations are described herein of an optical spectrometer and instruments including an optical spectrometer. In some instances, the optical spectrometer is configured to spatially separate provided wavelengths of light to permit detection or imaging of each provided wavelength of light. Improved sensitivities and detection limits may be achieved using the optical spectrometers described herein.

Spectrometers and instruments including them

A spectrometer with an unobstructed, Schmidt reflector is described. The spectrometer may include a Schmidt corrector and a dispersive element as separate components. Alternatively, the Schmidt corrector and dispersive element may be combined into a single optical component. The spectrometer may further include a field-flattener lens.

Certain aspects, configurations, embodiments, and examples of a spectrometer with a compact design are described. In some implementations, the spectrometers according to the present disclosure may be used for optical emission spectroscopy (OES). The spectrometer architecture and imager described herein allows a single detector, compact, and high-throughput spectrometer. One or more aspects include an Echelle grating in a spectrometer that reuses optical surfaces to separate wavelengths of light. For example, in one or more aspects, a reflective triplet telescope acts as both a collimator and imager. By reusing optical components, the relative size of the spectrometer may be reduced.

Spectrometers with retro-reflective surfaces and related instruments

A flow cell for a fluorescence spectrometer includes a flow channel to receive a flow of a liquid sample, an excitation light entrance window to receive excitation light from a light source, and an emission light exit window to transmit fluorescent emission light from the liquid sample in the flow channel from the flow cell. The excitation light entrance window and/or emission light exit window includes a waveguide including: a waveguide core formed of a core material; and a cladding medium surrounding a portion of the waveguide core, wherein the cladding medium has a refractive index less than the refractive index of the core material. The waveguide defines a portion of the flow channel.

Flow cell modules and liquid sample analyzers and methods including same

A liquid sample analyzer includes a liquid sample source, a flow cell, an optical device and a plurality of optical fibers. The flow cell is configured to receive a flow of a liquid sample from the liquid sample source. The plurality of optical fibers optically connect the flow cell to the optical device to transmit light between the flow cell and the optical device.

A flow cell assembly for use in a liquid sample analyzer including a radiation source, a sensing device and a liquid sample source to supply a liquid sample includes an entrance joint member, a liquid core waveguide, a liquid sample feed tube, and an input optical fiber. The entrance joint member includes a waveguide receiving bore and a feed tube receiving bore. The liquid core waveguide is mounted in the waveguide receiving bore and defines a waveguide bore. The liquid sample feed tube is mounted in the feed tube receiving bore such that the liquid sample feed tube is in fluid communication with the waveguide bore to fluidly connect the liquid sample source to the waveguide bore. The input optical fiber is mounted in the entrance joint member to transmit radiation from the radiation source to the waveguide bore, which radiation is transmitted through the waveguide bore and the liquid sample therein to the sensing device.

Flow cell assembly for liquid sample analyzer

An optical metrology includes a library, a metrology tool and a library evolution tool. The library is generated to include a series of predicted measurements. Each predicted measurement is intended to match the measurements that a metrology device would record when analyzing a corresponding physical structure. The metrology tool compares its empirical measurements to the predicted measurements in the library. If a match is found, the metrology tool extracts a description of the corresponding physical structure from the library. The library evolution tool operates to improve the efficiency of the library. To make these improvements, the library evolution tool statistically analyzes the usage pattern of the library. Based on this analysis, the library evolution tool increases the resolution of commonly used portions of the library. The library evolution tool may also optionally reduce the resolution of less used portions of the library.

Evolution of library data sets

A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Flat spectrum illumination source for optical metrology

The subject invention relates to broadband optical metrology tools for performing measurements of patterned thin films on semiconductor integrated circuits. Particularly a family of optical designs for broadband, multi-wavelength, DUV-IR (185&#x3c;&#x3bb;&#x3c;900 nm) all-refractive optical systems. The designs have net focusing power and this is achieved by combining at least one positively powered optical element with one negatively powered optical element. The designs have small spot-size over the wavelength range spanning 185-900 nm with substantially reduced spherical aberration, axial color, sphero-chromatism and zonal spherical aberration. The refractive optical systems are broadly applicable to a large class of broadband optical wafer metrology tools including spectrophotometers, spectroscopic reflectometers, spectroscopic ellipsometers and spectroscopic scatterometers.

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Pleasanton, CA, United States of America

David M Aikens