Air Liquide America, L.p.

Other

Air Liquide Electronics U.S. LP

David L Snyder

Ashutosh Misra

Matthew L Fisher

Joe G Hoffman

Karl J Urquhart

Mary Dykstra Havlicek

Marshall E Cummings

Richard Swindell

Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner.

Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopy

Provided are a preconditioned resin and methods of preparation thereof as well as methods for purifying hydrogen peroxide solutions. The method includes preconditioning an anion exchange resin, wherein an anion exchange resin bed is provided and carbon dioxide gas is passed through the resin bed.

Resin preconditioning methods using carbon dioxide and methods for purifying hydrogen peroxide

On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.

Process and apparatus for blending and distributing a slurry solution

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Princeton, TX, United States of America

David L Snyder