Kla Corporation

Kla Tencor Corporation

David L Brown

Yung-Ho Alex Chuang

John Fielden

Jingjing Zhang

Xuefeng Liu

Sisir Yalamanchili

Devis Contarato

Ali R Ehsani

Guowu Zheng

Marcel Trimpl

Steve Zamek

The loading effects of boron layers on silicon within a window may be reduced or eliminated by depositing an adhesion layer on a dielectric layer before depositing the boron layer. The adhesion layer may reduce or eliminate lateral diffusion of boron species into the window by being deposited on the adhesion layer. The approach using the adhesion layer may enable forming the boron layer at the nanometer scale within windows which are at the tens of millimeters scale and below. The boron layer and the silicon layer may form a detector which may be used in scanning electron microscopes and the like.

CVD boron uniformity overcoming loading effects

Growing community of inventors

Los Gatos, CA, United States of America

David L Brown